JPS5222547A - Electron beam device - Google Patents
Electron beam deviceInfo
- Publication number
- JPS5222547A JPS5222547A JP50098997A JP9899775A JPS5222547A JP S5222547 A JPS5222547 A JP S5222547A JP 50098997 A JP50098997 A JP 50098997A JP 9899775 A JP9899775 A JP 9899775A JP S5222547 A JPS5222547 A JP S5222547A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- beam device
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50098997A JPS5222547A (en) | 1975-08-14 | 1975-08-14 | Electron beam device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50098997A JPS5222547A (en) | 1975-08-14 | 1975-08-14 | Electron beam device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5222547A true JPS5222547A (en) | 1977-02-19 |
| JPS5421038B2 JPS5421038B2 (enExample) | 1979-07-27 |
Family
ID=14234604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50098997A Granted JPS5222547A (en) | 1975-08-14 | 1975-08-14 | Electron beam device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5222547A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58102107A (ja) * | 1981-12-15 | 1983-06-17 | Fujitsu Ltd | 距離測定法 |
| JPS58132892A (ja) * | 1982-01-30 | 1983-08-08 | 株式会社ニコン | 光電式エンコ−ダ装置 |
| JPH01117709U (enExample) * | 1988-09-08 | 1989-08-09 |
-
1975
- 1975-08-14 JP JP50098997A patent/JPS5222547A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58102107A (ja) * | 1981-12-15 | 1983-06-17 | Fujitsu Ltd | 距離測定法 |
| JPS58132892A (ja) * | 1982-01-30 | 1983-08-08 | 株式会社ニコン | 光電式エンコ−ダ装置 |
| JPH01117709U (enExample) * | 1988-09-08 | 1989-08-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5421038B2 (enExample) | 1979-07-27 |
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