JPS5222372A - Tubular body cleaning equipment of quartz tube for diffustion - Google Patents
Tubular body cleaning equipment of quartz tube for diffustionInfo
- Publication number
- JPS5222372A JPS5222372A JP50099148A JP9914875A JPS5222372A JP S5222372 A JPS5222372 A JP S5222372A JP 50099148 A JP50099148 A JP 50099148A JP 9914875 A JP9914875 A JP 9914875A JP S5222372 A JPS5222372 A JP S5222372A
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- diffustion
- tubular body
- cleaning equipment
- body cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50099148A JPS5222372A (en) | 1975-08-14 | 1975-08-14 | Tubular body cleaning equipment of quartz tube for diffustion |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50099148A JPS5222372A (en) | 1975-08-14 | 1975-08-14 | Tubular body cleaning equipment of quartz tube for diffustion |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5222372A true JPS5222372A (en) | 1977-02-19 |
JPS5311150B2 JPS5311150B2 (un) | 1978-04-19 |
Family
ID=14239595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50099148A Granted JPS5222372A (en) | 1975-08-14 | 1975-08-14 | Tubular body cleaning equipment of quartz tube for diffustion |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5222372A (un) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5449174U (un) * | 1977-09-13 | 1979-04-05 |
-
1975
- 1975-08-14 JP JP50099148A patent/JPS5222372A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5449174U (un) * | 1977-09-13 | 1979-04-05 |
Also Published As
Publication number | Publication date |
---|---|
JPS5311150B2 (un) | 1978-04-19 |
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