JPS5311150B2 - - Google Patents
Info
- Publication number
- JPS5311150B2 JPS5311150B2 JP9914875A JP9914875A JPS5311150B2 JP S5311150 B2 JPS5311150 B2 JP S5311150B2 JP 9914875 A JP9914875 A JP 9914875A JP 9914875 A JP9914875 A JP 9914875A JP S5311150 B2 JPS5311150 B2 JP S5311150B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50099148A JPS5222372A (en) | 1975-08-14 | 1975-08-14 | Tubular body cleaning equipment of quartz tube for diffustion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50099148A JPS5222372A (en) | 1975-08-14 | 1975-08-14 | Tubular body cleaning equipment of quartz tube for diffustion |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5222372A JPS5222372A (en) | 1977-02-19 |
| JPS5311150B2 true JPS5311150B2 (un) | 1978-04-19 |
Family
ID=14239595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50099148A Granted JPS5222372A (en) | 1975-08-14 | 1975-08-14 | Tubular body cleaning equipment of quartz tube for diffustion |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5222372A (un) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5449174U (un) * | 1977-09-13 | 1979-04-05 |
-
1975
- 1975-08-14 JP JP50099148A patent/JPS5222372A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5222372A (en) | 1977-02-19 |