JPS5221772A - Measuring system for working temperature of semiconductor element - Google Patents

Measuring system for working temperature of semiconductor element

Info

Publication number
JPS5221772A
JPS5221772A JP9798375A JP9798375A JPS5221772A JP S5221772 A JPS5221772 A JP S5221772A JP 9798375 A JP9798375 A JP 9798375A JP 9798375 A JP9798375 A JP 9798375A JP S5221772 A JPS5221772 A JP S5221772A
Authority
JP
Japan
Prior art keywords
working temperature
semiconductor element
measuring system
wave
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9798375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5619590B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masatoshi Kihara
Kazuyoshi Egawa
Kunio Akata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9798375A priority Critical patent/JPS5221772A/ja
Publication of JPS5221772A publication Critical patent/JPS5221772A/ja
Publication of JPS5619590B2 publication Critical patent/JPS5619590B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP9798375A 1975-08-12 1975-08-12 Measuring system for working temperature of semiconductor element Granted JPS5221772A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9798375A JPS5221772A (en) 1975-08-12 1975-08-12 Measuring system for working temperature of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9798375A JPS5221772A (en) 1975-08-12 1975-08-12 Measuring system for working temperature of semiconductor element

Publications (2)

Publication Number Publication Date
JPS5221772A true JPS5221772A (en) 1977-02-18
JPS5619590B2 JPS5619590B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-05-08

Family

ID=14206890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9798375A Granted JPS5221772A (en) 1975-08-12 1975-08-12 Measuring system for working temperature of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5221772A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114334U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-02-21 1977-08-30
JPS5419672U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-07-08 1979-02-08
JPS61145704U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-03-01 1986-09-08
JP2001228199A (ja) * 1999-11-30 2001-08-24 Thomson Csf マイクロ波部品の温度を測定する方法及び装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01177294U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-06-03 1989-12-18

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114334U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-02-21 1977-08-30
JPS5419672U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-07-08 1979-02-08
JPS61145704U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-03-01 1986-09-08
JP2001228199A (ja) * 1999-11-30 2001-08-24 Thomson Csf マイクロ波部品の温度を測定する方法及び装置

Also Published As

Publication number Publication date
JPS5619590B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-05-08

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