JPS522164A - Wafer cleaning and drying device - Google Patents

Wafer cleaning and drying device

Info

Publication number
JPS522164A
JPS522164A JP7657375A JP7657375A JPS522164A JP S522164 A JPS522164 A JP S522164A JP 7657375 A JP7657375 A JP 7657375A JP 7657375 A JP7657375 A JP 7657375A JP S522164 A JPS522164 A JP S522164A
Authority
JP
Japan
Prior art keywords
drying device
wafer cleaning
cleaning
wafer
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7657375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5324776B2 (cs
Inventor
Hiroto Nagatomo
Ryoichi Okuda
Hisao Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7657375A priority Critical patent/JPS522164A/ja
Publication of JPS522164A publication Critical patent/JPS522164A/ja
Publication of JPS5324776B2 publication Critical patent/JPS5324776B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP7657375A 1975-06-24 1975-06-24 Wafer cleaning and drying device Granted JPS522164A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7657375A JPS522164A (en) 1975-06-24 1975-06-24 Wafer cleaning and drying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7657375A JPS522164A (en) 1975-06-24 1975-06-24 Wafer cleaning and drying device

Publications (2)

Publication Number Publication Date
JPS522164A true JPS522164A (en) 1977-01-08
JPS5324776B2 JPS5324776B2 (cs) 1978-07-22

Family

ID=13608973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7657375A Granted JPS522164A (en) 1975-06-24 1975-06-24 Wafer cleaning and drying device

Country Status (1)

Country Link
JP (1) JPS522164A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586963A (en) * 1978-12-22 1980-07-01 Hitachi Ltd Sealing device
US5069236A (en) * 1990-03-07 1991-12-03 Pathway Systems, Inc. Method and apparatus for cleaning disks
US5107880A (en) * 1990-03-07 1992-04-28 Pathway Systems, Inc. Disk cleaning apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586963A (en) * 1978-12-22 1980-07-01 Hitachi Ltd Sealing device
US5069236A (en) * 1990-03-07 1991-12-03 Pathway Systems, Inc. Method and apparatus for cleaning disks
US5107880A (en) * 1990-03-07 1992-04-28 Pathway Systems, Inc. Disk cleaning apparatus

Also Published As

Publication number Publication date
JPS5324776B2 (cs) 1978-07-22

Similar Documents

Publication Publication Date Title
JPS5212576A (en) Wafer washing drying device
JPS5271871A (en) Washing apparatus
JPS5274580A (en) Boat for vacuum evaporation
JPS522164A (en) Wafer cleaning and drying device
JPS51135185A (en) Washing device
JPS5210082A (en) Semiconductor device
JPS5364472A (en) Processing apparatus
JPS51114766A (en) Device for removing water from an umbrella
JPS5389277A (en) Dust exhausting apparatus
JPS525268A (en) Rotary coating device
JPS51131964A (en) Filter device
JPS524636A (en) Chamber pot cleaning device
JPS5238679A (en) Fine dust removing device of the type of cyclone
JPS5227278A (en) Semicondcutor unit
JPS51135465A (en) Semi-conductor unit
JPS5224888A (en) Breeding cage with flushing device
JPS5275976A (en) Wafer cleaning device
JPS5223745A (en) High frequency heating device
JPS51112292A (en) Semiconductor device
JPS51144073A (en) Washing roller of a washing device
JPS51129095A (en) Transfer device of hatch beam
JPS52141571A (en) Wafer holder
JPS51142748A (en) Local cleaning device
JPS5280570A (en) Specific gravity selecting apparatus
JPS5264280A (en) Semiconductor device