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Hitachi Ltd
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Hitachi Ltd
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Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP7556875ApriorityCriticalpatent/JPS52177A/en
Publication of JPS52177ApublicationCriticalpatent/JPS52177A/en
Testing Or Measuring Of Semiconductors Or The Like
(AREA)
Abstract
PURPOSE: To provide adjustable contacting degree of inspection needle contacted with a part to be checked in predetermined pressure range by supporting the needle at the ends of leaf springs of a pair provided in parallel with each other.