JPS52175A - Loader/unloader - Google Patents
Loader/unloaderInfo
- Publication number
- JPS52175A JPS52175A JP50075597A JP7559775A JPS52175A JP S52175 A JPS52175 A JP S52175A JP 50075597 A JP50075597 A JP 50075597A JP 7559775 A JP7559775 A JP 7559775A JP S52175 A JPS52175 A JP S52175A
- Authority
- JP
- Japan
- Prior art keywords
- loader
- unloader
- wafer
- eliminate
- damage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To eliminate a damage of a wafer in treatment by providing a prealignment mechanism utilizing an air injection at the forward position of a conveyor connected to a loader.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50075597A JPS52175A (en) | 1975-06-23 | 1975-06-23 | Loader/unloader |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50075597A JPS52175A (en) | 1975-06-23 | 1975-06-23 | Loader/unloader |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52175A true JPS52175A (en) | 1977-01-05 |
Family
ID=13580760
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50075597A Pending JPS52175A (en) | 1975-06-23 | 1975-06-23 | Loader/unloader |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52175A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4954791A (en) * | 1972-09-27 | 1974-05-28 | ||
JPS5021682A (en) * | 1973-05-21 | 1975-03-07 |
-
1975
- 1975-06-23 JP JP50075597A patent/JPS52175A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4954791A (en) * | 1972-09-27 | 1974-05-28 | ||
JPS5021682A (en) * | 1973-05-21 | 1975-03-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080727 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090727 Year of fee payment: 8 |
|
LAPS | Cancellation because of no payment of annual fees |