JPS52149238A - Chemical etching solution for semiiconductors - Google Patents
Chemical etching solution for semiiconductorsInfo
- Publication number
- JPS52149238A JPS52149238A JP6700776A JP6700776A JPS52149238A JP S52149238 A JPS52149238 A JP S52149238A JP 6700776 A JP6700776 A JP 6700776A JP 6700776 A JP6700776 A JP 6700776A JP S52149238 A JPS52149238 A JP S52149238A
- Authority
- JP
- Japan
- Prior art keywords
- semiiconductors
- etching solution
- chemical etching
- chemical
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6700776A JPS52149238A (en) | 1976-06-07 | 1976-06-07 | Chemical etching solution for semiiconductors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6700776A JPS52149238A (en) | 1976-06-07 | 1976-06-07 | Chemical etching solution for semiiconductors |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52149238A true JPS52149238A (en) | 1977-12-12 |
Family
ID=13332425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6700776A Pending JPS52149238A (en) | 1976-06-07 | 1976-06-07 | Chemical etching solution for semiiconductors |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52149238A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002363775A (en) * | 2001-05-31 | 2002-12-18 | Disco Abrasive Syst Ltd | Etching method and etching system |
-
1976
- 1976-06-07 JP JP6700776A patent/JPS52149238A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002363775A (en) * | 2001-05-31 | 2002-12-18 | Disco Abrasive Syst Ltd | Etching method and etching system |
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