JPS52143786A - Semiconductor pressure, differential pressure transmitter - Google Patents

Semiconductor pressure, differential pressure transmitter

Info

Publication number
JPS52143786A
JPS52143786A JP6017776A JP6017776A JPS52143786A JP S52143786 A JPS52143786 A JP S52143786A JP 6017776 A JP6017776 A JP 6017776A JP 6017776 A JP6017776 A JP 6017776A JP S52143786 A JPS52143786 A JP S52143786A
Authority
JP
Japan
Prior art keywords
pressure
semiconductor
transmitter
differential pressure
differential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6017776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6155789B2 (enrdf_load_stackoverflow
Inventor
Shunji Shiromizu
Shozo Sato
Susumu Kimijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6017776A priority Critical patent/JPS52143786A/ja
Publication of JPS52143786A publication Critical patent/JPS52143786A/ja
Publication of JPS6155789B2 publication Critical patent/JPS6155789B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP6017776A 1976-05-26 1976-05-26 Semiconductor pressure, differential pressure transmitter Granted JPS52143786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6017776A JPS52143786A (en) 1976-05-26 1976-05-26 Semiconductor pressure, differential pressure transmitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6017776A JPS52143786A (en) 1976-05-26 1976-05-26 Semiconductor pressure, differential pressure transmitter

Publications (2)

Publication Number Publication Date
JPS52143786A true JPS52143786A (en) 1977-11-30
JPS6155789B2 JPS6155789B2 (enrdf_load_stackoverflow) 1986-11-29

Family

ID=13134602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6017776A Granted JPS52143786A (en) 1976-05-26 1976-05-26 Semiconductor pressure, differential pressure transmitter

Country Status (1)

Country Link
JP (1) JPS52143786A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687196A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Differential pressure transmitter
JPS61181340U (enrdf_load_stackoverflow) * 1984-09-25 1986-11-12
JPS6318231A (ja) * 1986-07-10 1988-01-26 Shimon Kk 半導体圧力センサ
JPH0393756U (enrdf_load_stackoverflow) * 1990-01-12 1991-09-25
JPH0489540A (ja) * 1990-08-01 1992-03-23 Mitsubishi Electric Corp 半導体圧力センサ
JP2011503450A (ja) * 2007-11-02 2011-01-27 インテグリス・インコーポレーテッド 一体型フェイスシール

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687196A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Differential pressure transmitter
JPS61181340U (enrdf_load_stackoverflow) * 1984-09-25 1986-11-12
JPS6318231A (ja) * 1986-07-10 1988-01-26 Shimon Kk 半導体圧力センサ
JPH0393756U (enrdf_load_stackoverflow) * 1990-01-12 1991-09-25
JPH0489540A (ja) * 1990-08-01 1992-03-23 Mitsubishi Electric Corp 半導体圧力センサ
JP2011503450A (ja) * 2007-11-02 2011-01-27 インテグリス・インコーポレーテッド 一体型フェイスシール

Also Published As

Publication number Publication date
JPS6155789B2 (enrdf_load_stackoverflow) 1986-11-29

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