JPS52135886A - Removal of oxygen gas and steam - Google Patents

Removal of oxygen gas and steam

Info

Publication number
JPS52135886A
JPS52135886A JP5278076A JP5278076A JPS52135886A JP S52135886 A JPS52135886 A JP S52135886A JP 5278076 A JP5278076 A JP 5278076A JP 5278076 A JP5278076 A JP 5278076A JP S52135886 A JPS52135886 A JP S52135886A
Authority
JP
Japan
Prior art keywords
steam
removal
oxygen gas
melt
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5278076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5627082B2 (cg-RX-API-DMAC10.html
Inventor
Hiroshi Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP5278076A priority Critical patent/JPS52135886A/ja
Publication of JPS52135886A publication Critical patent/JPS52135886A/ja
Publication of JPS5627082B2 publication Critical patent/JPS5627082B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Gas Separation By Absorption (AREA)
JP5278076A 1976-05-11 1976-05-11 Removal of oxygen gas and steam Granted JPS52135886A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5278076A JPS52135886A (en) 1976-05-11 1976-05-11 Removal of oxygen gas and steam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5278076A JPS52135886A (en) 1976-05-11 1976-05-11 Removal of oxygen gas and steam

Publications (2)

Publication Number Publication Date
JPS52135886A true JPS52135886A (en) 1977-11-14
JPS5627082B2 JPS5627082B2 (cg-RX-API-DMAC10.html) 1981-06-23

Family

ID=12924356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5278076A Granted JPS52135886A (en) 1976-05-11 1976-05-11 Removal of oxygen gas and steam

Country Status (1)

Country Link
JP (1) JPS52135886A (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288583U (cg-RX-API-DMAC10.html) * 1988-12-27 1990-07-13

Also Published As

Publication number Publication date
JPS5627082B2 (cg-RX-API-DMAC10.html) 1981-06-23

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