JPS52135668A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52135668A
JPS52135668A JP5341776A JP5341776A JPS52135668A JP S52135668 A JPS52135668 A JP S52135668A JP 5341776 A JP5341776 A JP 5341776A JP 5341776 A JP5341776 A JP 5341776A JP S52135668 A JPS52135668 A JP S52135668A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
metal film
wirings
thinning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5341776A
Other languages
Japanese (ja)
Inventor
Masaru Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP5341776A priority Critical patent/JPS52135668A/en
Publication of JPS52135668A publication Critical patent/JPS52135668A/en
Pending legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)

Abstract

PURPOSE: To considerably reduce the number of operating steps and increase the adhesion of a metal film by using plasma etching at the time of thinning the rear surface of a semiconductor substrate formed with semiconductor elements and wirings on the front surface by partly removing it and depositing a metal film thereon.
COPYRIGHT: (C)1977,JPO&Japio
JP5341776A 1976-05-10 1976-05-10 Production of semiconductor device Pending JPS52135668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5341776A JPS52135668A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5341776A JPS52135668A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52135668A true JPS52135668A (en) 1977-11-12

Family

ID=12942250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5341776A Pending JPS52135668A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52135668A (en)

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