JPS5213461A - Device for manufacturing thin metal film - Google Patents

Device for manufacturing thin metal film

Info

Publication number
JPS5213461A
JPS5213461A JP8978575A JP8978575A JPS5213461A JP S5213461 A JPS5213461 A JP S5213461A JP 8978575 A JP8978575 A JP 8978575A JP 8978575 A JP8978575 A JP 8978575A JP S5213461 A JPS5213461 A JP S5213461A
Authority
JP
Japan
Prior art keywords
metal film
thin metal
manufacturing thin
manufacturing
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8978575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5432636B2 (enrdf_load_stackoverflow
Inventor
Tsunehiko Endou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hokuriku Electric Industry Co Ltd
Original Assignee
Hokuriku Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hokuriku Electric Industry Co Ltd filed Critical Hokuriku Electric Industry Co Ltd
Priority to JP8978575A priority Critical patent/JPS5213461A/ja
Publication of JPS5213461A publication Critical patent/JPS5213461A/ja
Publication of JPS5432636B2 publication Critical patent/JPS5432636B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8978575A 1975-07-23 1975-07-23 Device for manufacturing thin metal film Granted JPS5213461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8978575A JPS5213461A (en) 1975-07-23 1975-07-23 Device for manufacturing thin metal film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8978575A JPS5213461A (en) 1975-07-23 1975-07-23 Device for manufacturing thin metal film

Publications (2)

Publication Number Publication Date
JPS5213461A true JPS5213461A (en) 1977-02-01
JPS5432636B2 JPS5432636B2 (enrdf_load_stackoverflow) 1979-10-16

Family

ID=13980324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8978575A Granted JPS5213461A (en) 1975-07-23 1975-07-23 Device for manufacturing thin metal film

Country Status (1)

Country Link
JP (1) JPS5213461A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152256U (enrdf_load_stackoverflow) * 1978-04-17 1979-10-23

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL1753529T3 (pl) 2004-05-20 2014-01-31 Eden Research Plc Mieszaniny zawierające cząsteczkę glukanu kapilarnego lub cząsteczkę ściany komórkowej z zamkniętym składnikiem terpenowym oraz sposoby ich wytwarzania i wykorzystania

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152256U (enrdf_load_stackoverflow) * 1978-04-17 1979-10-23

Also Published As

Publication number Publication date
JPS5432636B2 (enrdf_load_stackoverflow) 1979-10-16

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