JPS52123362A - Device for making thin metal film - Google Patents

Device for making thin metal film

Info

Publication number
JPS52123362A
JPS52123362A JP3925576A JP3925576A JPS52123362A JP S52123362 A JPS52123362 A JP S52123362A JP 3925576 A JP3925576 A JP 3925576A JP 3925576 A JP3925576 A JP 3925576A JP S52123362 A JPS52123362 A JP S52123362A
Authority
JP
Japan
Prior art keywords
metal film
thin metal
making thin
making
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3925576A
Other languages
Japanese (ja)
Other versions
JPS5523909B2 (en
Inventor
Tsunehiko Endou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hokuriku Electric Industry Co Ltd
Original Assignee
Hokuriku Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hokuriku Electric Industry Co Ltd filed Critical Hokuriku Electric Industry Co Ltd
Priority to JP3925576A priority Critical patent/JPS52123362A/en
Priority to US05/725,487 priority patent/US4080281A/en
Publication of JPS52123362A publication Critical patent/JPS52123362A/en
Publication of JPS5523909B2 publication Critical patent/JPS5523909B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3925576A 1976-04-09 1976-04-09 Device for making thin metal film Granted JPS52123362A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3925576A JPS52123362A (en) 1976-04-09 1976-04-09 Device for making thin metal film
US05/725,487 US4080281A (en) 1976-04-09 1976-09-22 Apparatus for making metal films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3925576A JPS52123362A (en) 1976-04-09 1976-04-09 Device for making thin metal film

Publications (2)

Publication Number Publication Date
JPS52123362A true JPS52123362A (en) 1977-10-17
JPS5523909B2 JPS5523909B2 (en) 1980-06-25

Family

ID=12548021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3925576A Granted JPS52123362A (en) 1976-04-09 1976-04-09 Device for making thin metal film

Country Status (1)

Country Link
JP (1) JPS52123362A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641375A (en) * 1979-09-13 1981-04-18 Matsushita Electric Ind Co Ltd Sputtering apparatus
US6280792B1 (en) 1998-10-02 2001-08-28 Sumitomo Special Metals Co., Ltd. Surface-treating process using support member having plate-like elements

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645892U (en) * 1987-06-30 1989-01-13
JPH0190688U (en) * 1987-12-07 1989-06-14

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515279A (en) * 1974-05-28 1976-01-16 Corning Glass Works Fukusunoenchukeibutsutaioitsuseinihifukusuruhohooyobi kaitensupatsutasochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515279A (en) * 1974-05-28 1976-01-16 Corning Glass Works Fukusunoenchukeibutsutaioitsuseinihifukusuruhohooyobi kaitensupatsutasochi

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641375A (en) * 1979-09-13 1981-04-18 Matsushita Electric Ind Co Ltd Sputtering apparatus
US6280792B1 (en) 1998-10-02 2001-08-28 Sumitomo Special Metals Co., Ltd. Surface-treating process using support member having plate-like elements
US6821560B2 (en) 1998-10-02 2004-11-23 Neomax Co. Ltd. Surface-treating support member and method using the same
US6878210B2 (en) 1998-10-02 2005-04-12 Sumitomo Special Metals Co., Ltd. Surface-treating holder having tubular structure and method using the same

Also Published As

Publication number Publication date
JPS5523909B2 (en) 1980-06-25

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