JPS52123362A - Device for making thin metal film - Google Patents
Device for making thin metal filmInfo
- Publication number
- JPS52123362A JPS52123362A JP3925576A JP3925576A JPS52123362A JP S52123362 A JPS52123362 A JP S52123362A JP 3925576 A JP3925576 A JP 3925576A JP 3925576 A JP3925576 A JP 3925576A JP S52123362 A JPS52123362 A JP S52123362A
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- thin metal
- making thin
- making
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3925576A JPS52123362A (en) | 1976-04-09 | 1976-04-09 | Device for making thin metal film |
US05/725,487 US4080281A (en) | 1976-04-09 | 1976-09-22 | Apparatus for making metal films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3925576A JPS52123362A (en) | 1976-04-09 | 1976-04-09 | Device for making thin metal film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52123362A true JPS52123362A (en) | 1977-10-17 |
JPS5523909B2 JPS5523909B2 (en) | 1980-06-25 |
Family
ID=12548021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3925576A Granted JPS52123362A (en) | 1976-04-09 | 1976-04-09 | Device for making thin metal film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52123362A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5641375A (en) * | 1979-09-13 | 1981-04-18 | Matsushita Electric Ind Co Ltd | Sputtering apparatus |
US6280792B1 (en) | 1998-10-02 | 2001-08-28 | Sumitomo Special Metals Co., Ltd. | Surface-treating process using support member having plate-like elements |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS645892U (en) * | 1987-06-30 | 1989-01-13 | ||
JPH0190688U (en) * | 1987-12-07 | 1989-06-14 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS515279A (en) * | 1974-05-28 | 1976-01-16 | Corning Glass Works | Fukusunoenchukeibutsutaioitsuseinihifukusuruhohooyobi kaitensupatsutasochi |
-
1976
- 1976-04-09 JP JP3925576A patent/JPS52123362A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS515279A (en) * | 1974-05-28 | 1976-01-16 | Corning Glass Works | Fukusunoenchukeibutsutaioitsuseinihifukusuruhohooyobi kaitensupatsutasochi |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5641375A (en) * | 1979-09-13 | 1981-04-18 | Matsushita Electric Ind Co Ltd | Sputtering apparatus |
US6280792B1 (en) | 1998-10-02 | 2001-08-28 | Sumitomo Special Metals Co., Ltd. | Surface-treating process using support member having plate-like elements |
US6821560B2 (en) | 1998-10-02 | 2004-11-23 | Neomax Co. Ltd. | Surface-treating support member and method using the same |
US6878210B2 (en) | 1998-10-02 | 2005-04-12 | Sumitomo Special Metals Co., Ltd. | Surface-treating holder having tubular structure and method using the same |
Also Published As
Publication number | Publication date |
---|---|
JPS5523909B2 (en) | 1980-06-25 |
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