JPS5432636B2 - - Google Patents

Info

Publication number
JPS5432636B2
JPS5432636B2 JP8978575A JP8978575A JPS5432636B2 JP S5432636 B2 JPS5432636 B2 JP S5432636B2 JP 8978575 A JP8978575 A JP 8978575A JP 8978575 A JP8978575 A JP 8978575A JP S5432636 B2 JPS5432636 B2 JP S5432636B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8978575A
Other languages
Japanese (ja)
Other versions
JPS5213461A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8978575A priority Critical patent/JPS5213461A/ja
Publication of JPS5213461A publication Critical patent/JPS5213461A/ja
Publication of JPS5432636B2 publication Critical patent/JPS5432636B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8978575A 1975-07-23 1975-07-23 Device for manufacturing thin metal film Granted JPS5213461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8978575A JPS5213461A (en) 1975-07-23 1975-07-23 Device for manufacturing thin metal film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8978575A JPS5213461A (en) 1975-07-23 1975-07-23 Device for manufacturing thin metal film

Publications (2)

Publication Number Publication Date
JPS5213461A JPS5213461A (en) 1977-02-01
JPS5432636B2 true JPS5432636B2 (enrdf_load_stackoverflow) 1979-10-16

Family

ID=13980324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8978575A Granted JPS5213461A (en) 1975-07-23 1975-07-23 Device for manufacturing thin metal film

Country Status (1)

Country Link
JP (1) JPS5213461A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10638750B2 (en) 2004-05-20 2020-05-05 Eden Research Plc Compositions containing a hollow glucan particle or a cell wall particle encapsulating a terpene component, methods of making and using them

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58695Y2 (ja) * 1978-04-17 1983-01-07 日本真空技術株式会社 ドライプレ−テイング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10638750B2 (en) 2004-05-20 2020-05-05 Eden Research Plc Compositions containing a hollow glucan particle or a cell wall particle encapsulating a terpene component, methods of making and using them

Also Published As

Publication number Publication date
JPS5213461A (en) 1977-02-01

Similar Documents

Publication Publication Date Title
FR2309839B1 (enrdf_load_stackoverflow)
FR2307350B1 (enrdf_load_stackoverflow)
FR2314673B1 (enrdf_load_stackoverflow)
JPS51140725U (enrdf_load_stackoverflow)
FR2320705B1 (enrdf_load_stackoverflow)
JPS5515811B2 (enrdf_load_stackoverflow)
JPS51130155U (enrdf_load_stackoverflow)
JPS5263014U (enrdf_load_stackoverflow)
JPS5226794U (enrdf_load_stackoverflow)
JPS5286977U (enrdf_load_stackoverflow)
JPS5513566Y2 (enrdf_load_stackoverflow)
JPS5345754Y2 (enrdf_load_stackoverflow)
JPS5232398Y2 (enrdf_load_stackoverflow)
JPS51142449U (enrdf_load_stackoverflow)
JPS5295665U (enrdf_load_stackoverflow)
JPS51130149U (enrdf_load_stackoverflow)
JPS51156910U (enrdf_load_stackoverflow)
JPS5210748U (enrdf_load_stackoverflow)
JPS5271408U (enrdf_load_stackoverflow)
CH585086A5 (enrdf_load_stackoverflow)
CH585501A5 (enrdf_load_stackoverflow)
BG22640A1 (enrdf_load_stackoverflow)
BG23048A1 (enrdf_load_stackoverflow)
CH596196A5 (enrdf_load_stackoverflow)
CH582894A5 (enrdf_load_stackoverflow)