JPS52133044A - Method of etching aluminum - Google Patents

Method of etching aluminum

Info

Publication number
JPS52133044A
JPS52133044A JP4953876A JP4953876A JPS52133044A JP S52133044 A JPS52133044 A JP S52133044A JP 4953876 A JP4953876 A JP 4953876A JP 4953876 A JP4953876 A JP 4953876A JP S52133044 A JPS52133044 A JP S52133044A
Authority
JP
Japan
Prior art keywords
etching aluminum
etching
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4953876A
Other languages
Japanese (ja)
Other versions
JPS5945760B2 (en
Inventor
Minoru Hirota
Kouki Usuki
Shiyouichi Mogi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HITACHI DENKAIHAKU KENKYUSHO
Original Assignee
HITACHI DENKAIHAKU KENKYUSHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HITACHI DENKAIHAKU KENKYUSHO filed Critical HITACHI DENKAIHAKU KENKYUSHO
Priority to JP51049538A priority Critical patent/JPS5945760B2/en
Publication of JPS52133044A publication Critical patent/JPS52133044A/en
Publication of JPS5945760B2 publication Critical patent/JPS5945760B2/en
Expired legal-status Critical Current

Links

JP51049538A 1976-04-30 1976-04-30 Aluminum etching method Expired JPS5945760B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51049538A JPS5945760B2 (en) 1976-04-30 1976-04-30 Aluminum etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51049538A JPS5945760B2 (en) 1976-04-30 1976-04-30 Aluminum etching method

Publications (2)

Publication Number Publication Date
JPS52133044A true JPS52133044A (en) 1977-11-08
JPS5945760B2 JPS5945760B2 (en) 1984-11-08

Family

ID=12833946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51049538A Expired JPS5945760B2 (en) 1976-04-30 1976-04-30 Aluminum etching method

Country Status (1)

Country Link
JP (1) JPS5945760B2 (en)

Also Published As

Publication number Publication date
JPS5945760B2 (en) 1984-11-08

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