JPS52131940A - Method of chemically etching aluminum films - Google Patents

Method of chemically etching aluminum films

Info

Publication number
JPS52131940A
JPS52131940A JP4927976A JP4927976A JPS52131940A JP S52131940 A JPS52131940 A JP S52131940A JP 4927976 A JP4927976 A JP 4927976A JP 4927976 A JP4927976 A JP 4927976A JP S52131940 A JPS52131940 A JP S52131940A
Authority
JP
Japan
Prior art keywords
chemically etching
aluminum films
etching aluminum
films
chemically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4927976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS556110B2 (enrdf_load_stackoverflow
Inventor
Yasuyoshi Umemura
Hiroshi Kishishita
Harumi Kosasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP4927976A priority Critical patent/JPS52131940A/ja
Publication of JPS52131940A publication Critical patent/JPS52131940A/ja
Publication of JPS556110B2 publication Critical patent/JPS556110B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Weting (AREA)
JP4927976A 1976-04-27 1976-04-27 Method of chemically etching aluminum films Granted JPS52131940A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4927976A JPS52131940A (en) 1976-04-27 1976-04-27 Method of chemically etching aluminum films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4927976A JPS52131940A (en) 1976-04-27 1976-04-27 Method of chemically etching aluminum films

Publications (2)

Publication Number Publication Date
JPS52131940A true JPS52131940A (en) 1977-11-05
JPS556110B2 JPS556110B2 (enrdf_load_stackoverflow) 1980-02-13

Family

ID=12826412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4927976A Granted JPS52131940A (en) 1976-04-27 1976-04-27 Method of chemically etching aluminum films

Country Status (1)

Country Link
JP (1) JPS52131940A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS556110B2 (enrdf_load_stackoverflow) 1980-02-13

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