JPS52128826A - Producing method of polycrystalline silicon in bar form - Google Patents
Producing method of polycrystalline silicon in bar formInfo
- Publication number
- JPS52128826A JPS52128826A JP4497276A JP4497276A JPS52128826A JP S52128826 A JPS52128826 A JP S52128826A JP 4497276 A JP4497276 A JP 4497276A JP 4497276 A JP4497276 A JP 4497276A JP S52128826 A JPS52128826 A JP S52128826A
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline silicon
- producing method
- bar form
- bar
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4497276A JPS52128826A (en) | 1976-04-22 | 1976-04-22 | Producing method of polycrystalline silicon in bar form |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4497276A JPS52128826A (en) | 1976-04-22 | 1976-04-22 | Producing method of polycrystalline silicon in bar form |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52128826A true JPS52128826A (en) | 1977-10-28 |
Family
ID=12706379
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4497276A Pending JPS52128826A (en) | 1976-04-22 | 1976-04-22 | Producing method of polycrystalline silicon in bar form |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52128826A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009536914A (en) * | 2006-05-11 | 2009-10-22 | コリア リサーチ インスティチュート オブ ケミカル テクノロジー | High purity silicon rod manufacturing apparatus and method using mixed core means |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4970825A (en) * | 1972-11-08 | 1974-07-09 |
-
1976
- 1976-04-22 JP JP4497276A patent/JPS52128826A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4970825A (en) * | 1972-11-08 | 1974-07-09 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009536914A (en) * | 2006-05-11 | 2009-10-22 | コリア リサーチ インスティチュート オブ ケミカル テクノロジー | High purity silicon rod manufacturing apparatus and method using mixed core means |
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