JPS52128826A - Producing method of polycrystalline silicon in bar form - Google Patents

Producing method of polycrystalline silicon in bar form

Info

Publication number
JPS52128826A
JPS52128826A JP4497276A JP4497276A JPS52128826A JP S52128826 A JPS52128826 A JP S52128826A JP 4497276 A JP4497276 A JP 4497276A JP 4497276 A JP4497276 A JP 4497276A JP S52128826 A JPS52128826 A JP S52128826A
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
producing method
bar form
bar
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4497276A
Other languages
Japanese (ja)
Inventor
Hiroshi Kawamura
Kazuyoshi Tabata
Seiichi Kirii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOUJIYUNDO SHIRIKON KK
Original Assignee
KOUJIYUNDO SHIRIKON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOUJIYUNDO SHIRIKON KK filed Critical KOUJIYUNDO SHIRIKON KK
Priority to JP4497276A priority Critical patent/JPS52128826A/en
Publication of JPS52128826A publication Critical patent/JPS52128826A/en
Pending legal-status Critical Current

Links

JP4497276A 1976-04-22 1976-04-22 Producing method of polycrystalline silicon in bar form Pending JPS52128826A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4497276A JPS52128826A (en) 1976-04-22 1976-04-22 Producing method of polycrystalline silicon in bar form

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4497276A JPS52128826A (en) 1976-04-22 1976-04-22 Producing method of polycrystalline silicon in bar form

Publications (1)

Publication Number Publication Date
JPS52128826A true JPS52128826A (en) 1977-10-28

Family

ID=12706379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4497276A Pending JPS52128826A (en) 1976-04-22 1976-04-22 Producing method of polycrystalline silicon in bar form

Country Status (1)

Country Link
JP (1) JPS52128826A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009536914A (en) * 2006-05-11 2009-10-22 コリア リサーチ インスティチュート オブ ケミカル テクノロジー High purity silicon rod manufacturing apparatus and method using mixed core means

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4970825A (en) * 1972-11-08 1974-07-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4970825A (en) * 1972-11-08 1974-07-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009536914A (en) * 2006-05-11 2009-10-22 コリア リサーチ インスティチュート オブ ケミカル テクノロジー High purity silicon rod manufacturing apparatus and method using mixed core means

Similar Documents

Publication Publication Date Title
JPS5353276A (en) Method of producing semiconductor device
JPS52113686A (en) Method of producing semiconductor device
JPS5370668A (en) Method of forming nntype region in silicon substrate
JPS51126324A (en) Producing method of silicon chips in sheet form
JPS532091A (en) Selffarraying method of producing ic
JPS52137276A (en) Method of producing semiconductor device
JPS53122684A (en) Method of forming silicon crystal
JPS5319922A (en) Producing method of crystalline silicon
JPS5321587A (en) Method of producing semiconductor device
JPS5294781A (en) Method of producing semiconductor device
JPS5310289A (en) Method of producing semiconductor device
CS191329B2 (en) Method of producing m-phenoxybenzaldehyde
JPS52119083A (en) Method of producing semiconductor device
JPS52141583A (en) Method of producing semiconductor device
JPS52136831A (en) Producing method of high purity silicon
JPS52151617A (en) Continuous producing method of silicon bars or tubes
JPS5448487A (en) Method of producing semiconductor
JPS535981A (en) Method of producing semiconductor device
JPS5347286A (en) Method of producing polycrystalline silicon used for semiconductor
JPS5334480A (en) Method of producing semiconductor element
JPS52128826A (en) Producing method of polycrystalline silicon in bar form
JPS52156578A (en) Method of producing semiconductor device
JPS5384680A (en) Method of producing semiconductor
JPS52151616A (en) Producing method and apparatus of bar form high purity silicon
JPS5265661A (en) Method of making silicon single crystal doped in nntype