JPS52128076A - Manufacture of field effect transistor - Google Patents

Manufacture of field effect transistor

Info

Publication number
JPS52128076A
JPS52128076A JP4509776A JP4509776A JPS52128076A JP S52128076 A JPS52128076 A JP S52128076A JP 4509776 A JP4509776 A JP 4509776A JP 4509776 A JP4509776 A JP 4509776A JP S52128076 A JPS52128076 A JP S52128076A
Authority
JP
Japan
Prior art keywords
manufacture
field effect
effect transistor
gate
fet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4509776A
Other languages
Japanese (ja)
Inventor
Kuni Ogawa
Takeya Ezaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4509776A priority Critical patent/JPS52128076A/en
Publication of JPS52128076A publication Critical patent/JPS52128076A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To decrease both the gate parasitic capacity and the wiring resistance in order to obtain an FET of good high frequency property with increased gm, by having short and accurate control of the gate length depending on the etching depth.
JP4509776A 1976-04-20 1976-04-20 Manufacture of field effect transistor Pending JPS52128076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4509776A JPS52128076A (en) 1976-04-20 1976-04-20 Manufacture of field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4509776A JPS52128076A (en) 1976-04-20 1976-04-20 Manufacture of field effect transistor

Publications (1)

Publication Number Publication Date
JPS52128076A true JPS52128076A (en) 1977-10-27

Family

ID=12709789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4509776A Pending JPS52128076A (en) 1976-04-20 1976-04-20 Manufacture of field effect transistor

Country Status (1)

Country Link
JP (1) JPS52128076A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5666076A (en) * 1979-11-02 1981-06-04 Tohoku Metal Ind Ltd Semiconductor device
JPS6292480A (en) * 1985-10-18 1987-04-27 Sanyo Electric Co Ltd Manufacture of compound semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5113581A (en) * 1974-07-24 1976-02-03 Hitachi Ltd DENKAIKOKATORANJISUTAOYOBISONO SEIHO

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5113581A (en) * 1974-07-24 1976-02-03 Hitachi Ltd DENKAIKOKATORANJISUTAOYOBISONO SEIHO

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5666076A (en) * 1979-11-02 1981-06-04 Tohoku Metal Ind Ltd Semiconductor device
JPS6292480A (en) * 1985-10-18 1987-04-27 Sanyo Electric Co Ltd Manufacture of compound semiconductor device

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