JPS5212560A - Electronic beam probe control device - Google Patents
Electronic beam probe control deviceInfo
- Publication number
- JPS5212560A JPS5212560A JP8824075A JP8824075A JPS5212560A JP S5212560 A JPS5212560 A JP S5212560A JP 8824075 A JP8824075 A JP 8824075A JP 8824075 A JP8824075 A JP 8824075A JP S5212560 A JPS5212560 A JP S5212560A
- Authority
- JP
- Japan
- Prior art keywords
- control device
- electronic beam
- probe control
- beam probe
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8824075A JPS5212560A (en) | 1975-07-21 | 1975-07-21 | Electronic beam probe control device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8824075A JPS5212560A (en) | 1975-07-21 | 1975-07-21 | Electronic beam probe control device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5212560A true JPS5212560A (en) | 1977-01-31 |
Family
ID=13937325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8824075A Pending JPS5212560A (en) | 1975-07-21 | 1975-07-21 | Electronic beam probe control device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5212560A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5492051A (en) * | 1977-12-29 | 1979-07-20 | Jeol Ltd | Focusing method and its apparatus for electron beam device |
JPS5726618A (en) * | 1976-02-09 | 1982-02-12 | Biiku Guruden Ronberugu Chem F | Hypertension remedy |
JPH03219543A (ja) * | 1990-01-24 | 1991-09-26 | Jeol Ltd | 走査型電子顕微鏡の自動焦点合わせ装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50141286A (ja) * | 1974-02-15 | 1975-11-13 | ||
JPS50141261A (ja) * | 1974-04-24 | 1975-11-13 |
-
1975
- 1975-07-21 JP JP8824075A patent/JPS5212560A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50141286A (ja) * | 1974-02-15 | 1975-11-13 | ||
JPS50141261A (ja) * | 1974-04-24 | 1975-11-13 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5726618A (en) * | 1976-02-09 | 1982-02-12 | Biiku Guruden Ronberugu Chem F | Hypertension remedy |
JPS5492051A (en) * | 1977-12-29 | 1979-07-20 | Jeol Ltd | Focusing method and its apparatus for electron beam device |
JPS5816746B2 (ja) * | 1977-12-29 | 1983-04-01 | 日本電子株式会社 | 電子線装置における焦点合わせ方法及び装置 |
JPH03219543A (ja) * | 1990-01-24 | 1991-09-26 | Jeol Ltd | 走査型電子顕微鏡の自動焦点合わせ装置 |
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