JPS52119181A - Check equipment for beam width of electron beam - Google Patents

Check equipment for beam width of electron beam

Info

Publication number
JPS52119181A
JPS52119181A JP3646876A JP3646876A JPS52119181A JP S52119181 A JPS52119181 A JP S52119181A JP 3646876 A JP3646876 A JP 3646876A JP 3646876 A JP3646876 A JP 3646876A JP S52119181 A JPS52119181 A JP S52119181A
Authority
JP
Japan
Prior art keywords
check equipment
electron beam
width
beam width
check
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3646876A
Other languages
Japanese (ja)
Inventor
Hiroshi Yasuda
Haruo Tsuchikawa
Kenichi Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3646876A priority Critical patent/JPS52119181A/en
Publication of JPS52119181A publication Critical patent/JPS52119181A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To facilitate the check of the beam diameter by comparing electron beam width of the period required to reach to the prescribed high and low slice level with that in the period obtained by the beam scan to be checked.
COPYRIGHT: (C)1977,JPO&Japio
JP3646876A 1976-03-31 1976-03-31 Check equipment for beam width of electron beam Pending JPS52119181A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3646876A JPS52119181A (en) 1976-03-31 1976-03-31 Check equipment for beam width of electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3646876A JPS52119181A (en) 1976-03-31 1976-03-31 Check equipment for beam width of electron beam

Publications (1)

Publication Number Publication Date
JPS52119181A true JPS52119181A (en) 1977-10-06

Family

ID=12470634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3646876A Pending JPS52119181A (en) 1976-03-31 1976-03-31 Check equipment for beam width of electron beam

Country Status (1)

Country Link
JP (1) JPS52119181A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60243960A (en) * 1984-05-18 1985-12-03 Hitachi Ltd Ion microbeam device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60243960A (en) * 1984-05-18 1985-12-03 Hitachi Ltd Ion microbeam device

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