JPS52119181A - Check equipment for beam width of electron beam - Google Patents
Check equipment for beam width of electron beamInfo
- Publication number
- JPS52119181A JPS52119181A JP3646876A JP3646876A JPS52119181A JP S52119181 A JPS52119181 A JP S52119181A JP 3646876 A JP3646876 A JP 3646876A JP 3646876 A JP3646876 A JP 3646876A JP S52119181 A JPS52119181 A JP S52119181A
- Authority
- JP
- Japan
- Prior art keywords
- check equipment
- electron beam
- width
- beam width
- check
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To facilitate the check of the beam diameter by comparing electron beam width of the period required to reach to the prescribed high and low slice level with that in the period obtained by the beam scan to be checked.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3646876A JPS52119181A (en) | 1976-03-31 | 1976-03-31 | Check equipment for beam width of electron beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3646876A JPS52119181A (en) | 1976-03-31 | 1976-03-31 | Check equipment for beam width of electron beam |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52119181A true JPS52119181A (en) | 1977-10-06 |
Family
ID=12470634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3646876A Pending JPS52119181A (en) | 1976-03-31 | 1976-03-31 | Check equipment for beam width of electron beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52119181A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60243960A (en) * | 1984-05-18 | 1985-12-03 | Hitachi Ltd | Ion microbeam device |
-
1976
- 1976-03-31 JP JP3646876A patent/JPS52119181A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60243960A (en) * | 1984-05-18 | 1985-12-03 | Hitachi Ltd | Ion microbeam device |
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