JPS52115666A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS52115666A
JPS52115666A JP3197576A JP3197576A JPS52115666A JP S52115666 A JPS52115666 A JP S52115666A JP 3197576 A JP3197576 A JP 3197576A JP 3197576 A JP3197576 A JP 3197576A JP S52115666 A JPS52115666 A JP S52115666A
Authority
JP
Japan
Prior art keywords
semiconductor device
making
igfet
specified
produce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3197576A
Other languages
English (en)
Other versions
JPS5532229B2 (ja
Inventor
Shinji Onga
Kazumichi Omura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP3197576A priority Critical patent/JPS52115666A/ja
Publication of JPS52115666A publication Critical patent/JPS52115666A/ja
Publication of JPS5532229B2 publication Critical patent/JPS5532229B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)
JP3197576A 1976-03-25 1976-03-25 Semiconductor device Granted JPS52115666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3197576A JPS52115666A (en) 1976-03-25 1976-03-25 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3197576A JPS52115666A (en) 1976-03-25 1976-03-25 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS52115666A true JPS52115666A (en) 1977-09-28
JPS5532229B2 JPS5532229B2 (ja) 1980-08-23

Family

ID=12345941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3197576A Granted JPS52115666A (en) 1976-03-25 1976-03-25 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS52115666A (ja)

Also Published As

Publication number Publication date
JPS5532229B2 (ja) 1980-08-23

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