JPS52113400A - Wafer-shaped doping material based on aluminum metaphosphate and produ ction thereof - Google Patents
Wafer-shaped doping material based on aluminum metaphosphate and produ ction thereofInfo
- Publication number
- JPS52113400A JPS52113400A JP2840476A JP2840476A JPS52113400A JP S52113400 A JPS52113400 A JP S52113400A JP 2840476 A JP2840476 A JP 2840476A JP 2840476 A JP2840476 A JP 2840476A JP S52113400 A JPS52113400 A JP S52113400A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- doping material
- aluminum metaphosphate
- material based
- shaped doping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- DHAHRLDIUIPTCJ-UHFFFAOYSA-K aluminium metaphosphate Chemical compound [Al+3].[O-]P(=O)=O.[O-]P(=O)=O.[O-]P(=O)=O DHAHRLDIUIPTCJ-UHFFFAOYSA-K 0.000 title abstract 2
- 239000000463 material Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000465 moulding Methods 0.000 abstract 3
- 239000011230 binding agent Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 230000035939 shock Effects 0.000 abstract 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 1
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 1
- 238000005245 sintering Methods 0.000 abstract 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2840476A JPS52113400A (en) | 1976-03-16 | 1976-03-16 | Wafer-shaped doping material based on aluminum metaphosphate and produ ction thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2840476A JPS52113400A (en) | 1976-03-16 | 1976-03-16 | Wafer-shaped doping material based on aluminum metaphosphate and produ ction thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52113400A true JPS52113400A (en) | 1977-09-22 |
JPS555263B2 JPS555263B2 (enrdf_load_stackoverflow) | 1980-02-05 |
Family
ID=12247716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2840476A Granted JPS52113400A (en) | 1976-03-16 | 1976-03-16 | Wafer-shaped doping material based on aluminum metaphosphate and produ ction thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52113400A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56110962U (enrdf_load_stackoverflow) * | 1980-01-29 | 1981-08-27 | ||
JPS6339572U (enrdf_load_stackoverflow) * | 1986-08-29 | 1988-03-14 | ||
JP6460069B2 (ja) | 2016-05-31 | 2019-01-30 | Jfeスチール株式会社 | 肌焼鋼およびその製造方法ならびに歯車部品の製造方法 |
-
1976
- 1976-03-16 JP JP2840476A patent/JPS52113400A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS555263B2 (enrdf_load_stackoverflow) | 1980-02-05 |
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