JPS52113168A - Electron beam exposing device - Google Patents
Electron beam exposing deviceInfo
- Publication number
- JPS52113168A JPS52113168A JP2925376A JP2925376A JPS52113168A JP S52113168 A JPS52113168 A JP S52113168A JP 2925376 A JP2925376 A JP 2925376A JP 2925376 A JP2925376 A JP 2925376A JP S52113168 A JPS52113168 A JP S52113168A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposing device
- beam exposing
- memory unit
- correction data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To scan correction at high speed by storing the correction data measured in advance in a memory unit whereby the correction data with respect to the given beam position are obrained as desired by addressing the memory unit without any operation.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2925376A JPS52113168A (en) | 1976-03-19 | 1976-03-19 | Electron beam exposing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2925376A JPS52113168A (en) | 1976-03-19 | 1976-03-19 | Electron beam exposing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52113168A true JPS52113168A (en) | 1977-09-22 |
JPS5319903B2 JPS5319903B2 (en) | 1978-06-23 |
Family
ID=12271098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2925376A Granted JPS52113168A (en) | 1976-03-19 | 1976-03-19 | Electron beam exposing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52113168A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54105970A (en) * | 1978-02-08 | 1979-08-20 | Nippon Telegr & Teleph Corp <Ntt> | Electron beam drawing device and its use |
-
1976
- 1976-03-19 JP JP2925376A patent/JPS52113168A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54105970A (en) * | 1978-02-08 | 1979-08-20 | Nippon Telegr & Teleph Corp <Ntt> | Electron beam drawing device and its use |
Also Published As
Publication number | Publication date |
---|---|
JPS5319903B2 (en) | 1978-06-23 |
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