JPS5319903B2 - - Google Patents
Info
- Publication number
- JPS5319903B2 JPS5319903B2 JP2925376A JP2925376A JPS5319903B2 JP S5319903 B2 JPS5319903 B2 JP S5319903B2 JP 2925376 A JP2925376 A JP 2925376A JP 2925376 A JP2925376 A JP 2925376A JP S5319903 B2 JPS5319903 B2 JP S5319903B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2925376A JPS52113168A (en) | 1976-03-19 | 1976-03-19 | Electron beam exposing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2925376A JPS52113168A (en) | 1976-03-19 | 1976-03-19 | Electron beam exposing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52113168A JPS52113168A (en) | 1977-09-22 |
| JPS5319903B2 true JPS5319903B2 (en) | 1978-06-23 |
Family
ID=12271098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2925376A Granted JPS52113168A (en) | 1976-03-19 | 1976-03-19 | Electron beam exposing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52113168A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54105970A (en) * | 1978-02-08 | 1979-08-20 | Nippon Telegr & Teleph Corp <Ntt> | Electron beam drawing device and its use |
-
1976
- 1976-03-19 JP JP2925376A patent/JPS52113168A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52113168A (en) | 1977-09-22 |