JPS52113167A - X-ray exposing device - Google Patents

X-ray exposing device

Info

Publication number
JPS52113167A
JPS52113167A JP2919876A JP2919876A JPS52113167A JP S52113167 A JPS52113167 A JP S52113167A JP 2919876 A JP2919876 A JP 2919876A JP 2919876 A JP2919876 A JP 2919876A JP S52113167 A JPS52113167 A JP S52113167A
Authority
JP
Japan
Prior art keywords
exposing device
ray
ray exposing
withdrawing
dimensionally
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2919876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5334466B2 (enExample
Inventor
Toa Hayasaka
Satoru Nakayama
Yasunao Saito
Shinichi Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2919876A priority Critical patent/JPS52113167A/ja
Publication of JPS52113167A publication Critical patent/JPS52113167A/ja
Publication of JPS5334466B2 publication Critical patent/JPS5334466B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2919876A 1976-03-19 1976-03-19 X-ray exposing device Granted JPS52113167A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2919876A JPS52113167A (en) 1976-03-19 1976-03-19 X-ray exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2919876A JPS52113167A (en) 1976-03-19 1976-03-19 X-ray exposing device

Publications (2)

Publication Number Publication Date
JPS52113167A true JPS52113167A (en) 1977-09-22
JPS5334466B2 JPS5334466B2 (enExample) 1978-09-20

Family

ID=12269488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2919876A Granted JPS52113167A (en) 1976-03-19 1976-03-19 X-ray exposing device

Country Status (1)

Country Link
JP (1) JPS52113167A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551107A (en) * 1978-06-16 1980-01-07 Nippon Telegr & Teleph Corp <Ntt> Exposure device
JPS55101086U (enExample) * 1979-01-04 1980-07-14
JPS56501613A (enExample) * 1979-11-28 1981-11-05
JPS5783744U (enExample) * 1981-09-10 1982-05-24
JPS60178627A (ja) * 1984-02-24 1985-09-12 Canon Inc Ｘ線転写装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551107A (en) * 1978-06-16 1980-01-07 Nippon Telegr & Teleph Corp <Ntt> Exposure device
JPS55101086U (enExample) * 1979-01-04 1980-07-14
JPS56501613A (enExample) * 1979-11-28 1981-11-05
JPS5783744U (enExample) * 1981-09-10 1982-05-24
JPS60178627A (ja) * 1984-02-24 1985-09-12 Canon Inc Ｘ線転写装置

Also Published As

Publication number Publication date
JPS5334466B2 (enExample) 1978-09-20

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