JPS52111747U - - Google Patents

Info

Publication number
JPS52111747U
JPS52111747U JP1975776U JP1975776U JPS52111747U JP S52111747 U JPS52111747 U JP S52111747U JP 1975776 U JP1975776 U JP 1975776U JP 1975776 U JP1975776 U JP 1975776U JP S52111747 U JPS52111747 U JP S52111747U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1975776U
Other languages
Japanese (ja)
Other versions
JPS559634Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975776U priority Critical patent/JPS559634Y2/ja
Publication of JPS52111747U publication Critical patent/JPS52111747U/ja
Application granted granted Critical
Publication of JPS559634Y2 publication Critical patent/JPS559634Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1975776U 1976-02-20 1976-02-20 Expired JPS559634Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975776U JPS559634Y2 (enrdf_load_stackoverflow) 1976-02-20 1976-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975776U JPS559634Y2 (enrdf_load_stackoverflow) 1976-02-20 1976-02-20

Publications (2)

Publication Number Publication Date
JPS52111747U true JPS52111747U (enrdf_load_stackoverflow) 1977-08-25
JPS559634Y2 JPS559634Y2 (enrdf_load_stackoverflow) 1980-03-03

Family

ID=28479803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975776U Expired JPS559634Y2 (enrdf_load_stackoverflow) 1976-02-20 1976-02-20

Country Status (1)

Country Link
JP (1) JPS559634Y2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528386A (en) * 1978-08-21 1980-02-28 Vac Tec Syst Magnetron sputter apparatus
JPS56152963A (en) * 1980-04-30 1981-11-26 Hitachi Ltd Sputtering apparatus
JPS6180825A (ja) * 1984-09-28 1986-04-24 Hitachi Ltd 液体処理装置
WO2016136121A1 (ja) * 2015-02-24 2016-09-01 株式会社アルバック マグネトロンスパッタリング装置用の回転式カソードユニット

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528386A (en) * 1978-08-21 1980-02-28 Vac Tec Syst Magnetron sputter apparatus
JPS56152963A (en) * 1980-04-30 1981-11-26 Hitachi Ltd Sputtering apparatus
JPS6180825A (ja) * 1984-09-28 1986-04-24 Hitachi Ltd 液体処理装置
WO2016136121A1 (ja) * 2015-02-24 2016-09-01 株式会社アルバック マグネトロンスパッタリング装置用の回転式カソードユニット
JPWO2016136121A1 (ja) * 2015-02-24 2017-08-31 株式会社アルバック マグネトロンスパッタリング装置用の回転式カソードユニット
CN107250427A (zh) * 2015-02-24 2017-10-13 株式会社爱发科 磁控管溅射装置用旋转式阴极单元

Also Published As

Publication number Publication date
JPS559634Y2 (enrdf_load_stackoverflow) 1980-03-03

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