JPS559634Y2 - - Google Patents

Info

Publication number
JPS559634Y2
JPS559634Y2 JP1975776U JP1975776U JPS559634Y2 JP S559634 Y2 JPS559634 Y2 JP S559634Y2 JP 1975776 U JP1975776 U JP 1975776U JP 1975776 U JP1975776 U JP 1975776U JP S559634 Y2 JPS559634 Y2 JP S559634Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975776U
Other languages
Japanese (ja)
Other versions
JPS52111747U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975776U priority Critical patent/JPS559634Y2/ja
Publication of JPS52111747U publication Critical patent/JPS52111747U/ja
Application granted granted Critical
Publication of JPS559634Y2 publication Critical patent/JPS559634Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP1975776U 1976-02-20 1976-02-20 Expired JPS559634Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975776U JPS559634Y2 (enrdf_load_stackoverflow) 1976-02-20 1976-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975776U JPS559634Y2 (enrdf_load_stackoverflow) 1976-02-20 1976-02-20

Publications (2)

Publication Number Publication Date
JPS52111747U JPS52111747U (enrdf_load_stackoverflow) 1977-08-25
JPS559634Y2 true JPS559634Y2 (enrdf_load_stackoverflow) 1980-03-03

Family

ID=28479803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975776U Expired JPS559634Y2 (enrdf_load_stackoverflow) 1976-02-20 1976-02-20

Country Status (1)

Country Link
JP (1) JPS559634Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10378102B2 (en) 2015-02-24 2019-08-13 Ulvac, Inc. Rotary cathode unit for magnetron sputtering apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4162954A (en) * 1978-08-21 1979-07-31 Vac-Tec Systems, Inc. Planar magnetron sputtering device
JPS56152963A (en) * 1980-04-30 1981-11-26 Hitachi Ltd Sputtering apparatus
JPS6180825A (ja) * 1984-09-28 1986-04-24 Hitachi Ltd 液体処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10378102B2 (en) 2015-02-24 2019-08-13 Ulvac, Inc. Rotary cathode unit for magnetron sputtering apparatus

Also Published As

Publication number Publication date
JPS52111747U (enrdf_load_stackoverflow) 1977-08-25

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