JPS52109694A - Method of detecting mark position in machining charge particle wire - Google Patents

Method of detecting mark position in machining charge particle wire

Info

Publication number
JPS52109694A
JPS52109694A JP2637776A JP2637776A JPS52109694A JP S52109694 A JPS52109694 A JP S52109694A JP 2637776 A JP2637776 A JP 2637776A JP 2637776 A JP2637776 A JP 2637776A JP S52109694 A JPS52109694 A JP S52109694A
Authority
JP
Japan
Prior art keywords
machining
mark position
charge particle
detecting mark
particle wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2637776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5638055B2 (enrdf_load_html_response
Inventor
Kazumitsu Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP2637776A priority Critical patent/JPS52109694A/ja
Publication of JPS52109694A publication Critical patent/JPS52109694A/ja
Publication of JPS5638055B2 publication Critical patent/JPS5638055B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP2637776A 1976-03-11 1976-03-11 Method of detecting mark position in machining charge particle wire Granted JPS52109694A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2637776A JPS52109694A (en) 1976-03-11 1976-03-11 Method of detecting mark position in machining charge particle wire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2637776A JPS52109694A (en) 1976-03-11 1976-03-11 Method of detecting mark position in machining charge particle wire

Publications (2)

Publication Number Publication Date
JPS52109694A true JPS52109694A (en) 1977-09-14
JPS5638055B2 JPS5638055B2 (enrdf_load_html_response) 1981-09-03

Family

ID=12191816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2637776A Granted JPS52109694A (en) 1976-03-11 1976-03-11 Method of detecting mark position in machining charge particle wire

Country Status (1)

Country Link
JP (1) JPS52109694A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118778A (en) * 1978-03-08 1979-09-14 Cho Lsi Gijutsu Kenkyu Kumiai Method of detecting pattern
JPS58105543A (ja) * 1981-12-03 1983-06-23 エテック・システムズ・インコーポレイテッド ゲ−トアレ−特徴描写のための方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60195758U (ja) * 1984-06-02 1985-12-27 飯田商事株式会社 脱酸素剤を装着したキヤツプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IEEE TRANSACTIONS ON ELECTRON DEVICES=1975 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118778A (en) * 1978-03-08 1979-09-14 Cho Lsi Gijutsu Kenkyu Kumiai Method of detecting pattern
JPS58105543A (ja) * 1981-12-03 1983-06-23 エテック・システムズ・インコーポレイテッド ゲ−トアレ−特徴描写のための方法

Also Published As

Publication number Publication date
JPS5638055B2 (enrdf_load_html_response) 1981-09-03

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