JPS52109373A - Method of deflecting and scanning electron beam - Google Patents

Method of deflecting and scanning electron beam

Info

Publication number
JPS52109373A
JPS52109373A JP2591776A JP2591776A JPS52109373A JP S52109373 A JPS52109373 A JP S52109373A JP 2591776 A JP2591776 A JP 2591776A JP 2591776 A JP2591776 A JP 2591776A JP S52109373 A JPS52109373 A JP S52109373A
Authority
JP
Japan
Prior art keywords
deflecting
electron beam
scanning electron
scanning
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2591776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS546476B2 (cs
Inventor
Takashi Souma
Masanori Idesawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP2591776A priority Critical patent/JPS52109373A/ja
Publication of JPS52109373A publication Critical patent/JPS52109373A/ja
Publication of JPS546476B2 publication Critical patent/JPS546476B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP2591776A 1976-03-10 1976-03-10 Method of deflecting and scanning electron beam Granted JPS52109373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2591776A JPS52109373A (en) 1976-03-10 1976-03-10 Method of deflecting and scanning electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2591776A JPS52109373A (en) 1976-03-10 1976-03-10 Method of deflecting and scanning electron beam

Publications (2)

Publication Number Publication Date
JPS52109373A true JPS52109373A (en) 1977-09-13
JPS546476B2 JPS546476B2 (cs) 1979-03-28

Family

ID=12179118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2591776A Granted JPS52109373A (en) 1976-03-10 1976-03-10 Method of deflecting and scanning electron beam

Country Status (1)

Country Link
JP (1) JPS52109373A (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54137977A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Electron-beam exposure unit
JPS57181122A (en) * 1981-04-16 1982-11-08 Control Data Corp Electron beam array lithographic method and device
JPS5825235A (ja) * 1981-05-21 1983-02-15 コントロ−ル・デ−タ・コ−ポレ−シヨン 多重チヤンネル電子ビ−ム・アレイ・リソグラフイ装置
JPS61192444U (cs) * 1986-05-01 1986-11-29

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DENSHI TOKYO=1975 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54137977A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Electron-beam exposure unit
JPS57181122A (en) * 1981-04-16 1982-11-08 Control Data Corp Electron beam array lithographic method and device
JPS5825235A (ja) * 1981-05-21 1983-02-15 コントロ−ル・デ−タ・コ−ポレ−シヨン 多重チヤンネル電子ビ−ム・アレイ・リソグラフイ装置
JPS61192444U (cs) * 1986-05-01 1986-11-29

Also Published As

Publication number Publication date
JPS546476B2 (cs) 1979-03-28

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