JPS546476B2 - - Google Patents
Info
- Publication number
- JPS546476B2 JPS546476B2 JP2591776A JP2591776A JPS546476B2 JP S546476 B2 JPS546476 B2 JP S546476B2 JP 2591776 A JP2591776 A JP 2591776A JP 2591776 A JP2591776 A JP 2591776A JP S546476 B2 JPS546476 B2 JP S546476B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2591776A JPS52109373A (en) | 1976-03-10 | 1976-03-10 | Method of deflecting and scanning electron beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2591776A JPS52109373A (en) | 1976-03-10 | 1976-03-10 | Method of deflecting and scanning electron beam |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52109373A JPS52109373A (en) | 1977-09-13 |
JPS546476B2 true JPS546476B2 (cs) | 1979-03-28 |
Family
ID=12179118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2591776A Granted JPS52109373A (en) | 1976-03-10 | 1976-03-10 | Method of deflecting and scanning electron beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52109373A (cs) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54137977A (en) * | 1978-04-19 | 1979-10-26 | Hitachi Ltd | Electron-beam exposure unit |
US4430571A (en) * | 1981-04-16 | 1984-02-07 | Control Data Corporation | Method and apparatus for exposing multi-level registered patterns interchangeably between stations of a multi-station electron-beam array lithography (EBAL) system |
US4390789A (en) * | 1981-05-21 | 1983-06-28 | Control Data Corporation | Electron beam array lithography system employing multiple parallel array optics channels and method of operation |
JPS61192444U (cs) * | 1986-05-01 | 1986-11-29 |
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1976
- 1976-03-10 JP JP2591776A patent/JPS52109373A/ja active Granted
Non-Patent Citations (1)
Title |
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DENSHI TOKYO=1975 * |
Also Published As
Publication number | Publication date |
---|---|
JPS52109373A (en) | 1977-09-13 |