JPS52107285A - Prevention of attaching carbon to machinery and piping in which reduci ng gas is used - Google Patents
Prevention of attaching carbon to machinery and piping in which reduci ng gas is usedInfo
- Publication number
- JPS52107285A JPS52107285A JP2034276A JP2034276A JPS52107285A JP S52107285 A JPS52107285 A JP S52107285A JP 2034276 A JP2034276 A JP 2034276A JP 2034276 A JP2034276 A JP 2034276A JP S52107285 A JPS52107285 A JP S52107285A
- Authority
- JP
- Japan
- Prior art keywords
- machinery
- piping
- reduci
- prevention
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To diminish carbon formation facilitating effect of reducing gas due to vapor phase reaction by coating silicon carbide on the surface of machinery or piping contacting with reducing gas.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2034276A JPS52107285A (en) | 1976-02-25 | 1976-02-25 | Prevention of attaching carbon to machinery and piping in which reduci ng gas is used |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2034276A JPS52107285A (en) | 1976-02-25 | 1976-02-25 | Prevention of attaching carbon to machinery and piping in which reduci ng gas is used |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52107285A true JPS52107285A (en) | 1977-09-08 |
JPS5734350B2 JPS5734350B2 (en) | 1982-07-22 |
Family
ID=12024455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2034276A Granted JPS52107285A (en) | 1976-02-25 | 1976-02-25 | Prevention of attaching carbon to machinery and piping in which reduci ng gas is used |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52107285A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5815588A (en) * | 1981-07-22 | 1983-01-28 | Matsushita Electric Ind Co Ltd | Gas reformer |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60155358A (en) * | 1984-01-23 | 1985-08-15 | Disco Abrasive Sys Ltd | Method and device for grinding surface of semiconductor wafer |
JPH0698566B2 (en) * | 1988-09-17 | 1994-12-07 | シンワ測定株式会社 | Curve measuring machine |
-
1976
- 1976-02-25 JP JP2034276A patent/JPS52107285A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5815588A (en) * | 1981-07-22 | 1983-01-28 | Matsushita Electric Ind Co Ltd | Gas reformer |
Also Published As
Publication number | Publication date |
---|---|
JPS5734350B2 (en) | 1982-07-22 |
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