JPS52106671A - Device of liquid phase eptaxial growth - Google Patents

Device of liquid phase eptaxial growth

Info

Publication number
JPS52106671A
JPS52106671A JP2393976A JP2393976A JPS52106671A JP S52106671 A JPS52106671 A JP S52106671A JP 2393976 A JP2393976 A JP 2393976A JP 2393976 A JP2393976 A JP 2393976A JP S52106671 A JPS52106671 A JP S52106671A
Authority
JP
Japan
Prior art keywords
liquid phase
eptaxial
growth
eptaxial growth
constitutionas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2393976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS552890B2 (enExample
Inventor
Yoshiharu Horikoshi
Yoshitaka Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2393976A priority Critical patent/JPS52106671A/ja
Publication of JPS52106671A publication Critical patent/JPS52106671A/ja
Publication of JPS552890B2 publication Critical patent/JPS552890B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP2393976A 1976-03-05 1976-03-05 Device of liquid phase eptaxial growth Granted JPS52106671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2393976A JPS52106671A (en) 1976-03-05 1976-03-05 Device of liquid phase eptaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2393976A JPS52106671A (en) 1976-03-05 1976-03-05 Device of liquid phase eptaxial growth

Publications (2)

Publication Number Publication Date
JPS52106671A true JPS52106671A (en) 1977-09-07
JPS552890B2 JPS552890B2 (enExample) 1980-01-22

Family

ID=12124488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2393976A Granted JPS52106671A (en) 1976-03-05 1976-03-05 Device of liquid phase eptaxial growth

Country Status (1)

Country Link
JP (1) JPS52106671A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184865U (enExample) * 1981-05-18 1982-11-24

Also Published As

Publication number Publication date
JPS552890B2 (enExample) 1980-01-22

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