JPS52102680A - Precision position adjusting apparatus - Google Patents

Precision position adjusting apparatus

Info

Publication number
JPS52102680A
JPS52102680A JP1900676A JP1900676A JPS52102680A JP S52102680 A JPS52102680 A JP S52102680A JP 1900676 A JP1900676 A JP 1900676A JP 1900676 A JP1900676 A JP 1900676A JP S52102680 A JPS52102680 A JP S52102680A
Authority
JP
Japan
Prior art keywords
position adjusting
adjusting apparatus
precision position
face
movement table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1900676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5337709B2 (cg-RX-API-DMAC7.html
Inventor
Yasuo Nakagawa
Hiroshi Makihira
Yukio Kenbo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1900676A priority Critical patent/JPS52102680A/ja
Publication of JPS52102680A publication Critical patent/JPS52102680A/ja
Publication of JPS5337709B2 publication Critical patent/JPS5337709B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP1900676A 1976-02-25 1976-02-25 Precision position adjusting apparatus Granted JPS52102680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1900676A JPS52102680A (en) 1976-02-25 1976-02-25 Precision position adjusting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1900676A JPS52102680A (en) 1976-02-25 1976-02-25 Precision position adjusting apparatus

Publications (2)

Publication Number Publication Date
JPS52102680A true JPS52102680A (en) 1977-08-29
JPS5337709B2 JPS5337709B2 (cg-RX-API-DMAC7.html) 1978-10-11

Family

ID=11987420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1900676A Granted JPS52102680A (en) 1976-02-25 1976-02-25 Precision position adjusting apparatus

Country Status (1)

Country Link
JP (1) JPS52102680A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS5337709B2 (cg-RX-API-DMAC7.html) 1978-10-11

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