JPS52101695A - Production of cylindrical high purity quarts rod with distribution of refractive index - Google Patents

Production of cylindrical high purity quarts rod with distribution of refractive index

Info

Publication number
JPS52101695A
JPS52101695A JP1832276A JP1832276A JPS52101695A JP S52101695 A JPS52101695 A JP S52101695A JP 1832276 A JP1832276 A JP 1832276A JP 1832276 A JP1832276 A JP 1832276A JP S52101695 A JPS52101695 A JP S52101695A
Authority
JP
Japan
Prior art keywords
high purity
distribution
production
refractive index
cylindrical high
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1832276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5743535B2 (enrdf_load_stackoverflow
Inventor
Ryuji Kobayashi
Tadaaki Sugawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP1832276A priority Critical patent/JPS52101695A/ja
Publication of JPS52101695A publication Critical patent/JPS52101695A/ja
Publication of JPS5743535B2 publication Critical patent/JPS5743535B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Silicon Compounds (AREA)
JP1832276A 1976-02-21 1976-02-21 Production of cylindrical high purity quarts rod with distribution of refractive index Granted JPS52101695A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1832276A JPS52101695A (en) 1976-02-21 1976-02-21 Production of cylindrical high purity quarts rod with distribution of refractive index

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1832276A JPS52101695A (en) 1976-02-21 1976-02-21 Production of cylindrical high purity quarts rod with distribution of refractive index

Publications (2)

Publication Number Publication Date
JPS52101695A true JPS52101695A (en) 1977-08-25
JPS5743535B2 JPS5743535B2 (enrdf_load_stackoverflow) 1982-09-16

Family

ID=11968363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1832276A Granted JPS52101695A (en) 1976-02-21 1976-02-21 Production of cylindrical high purity quarts rod with distribution of refractive index

Country Status (1)

Country Link
JP (1) JPS52101695A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016534959A (ja) * 2013-09-30 2016-11-10 ヘレーウス クヴァルツグラース ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフトＨｅｒａｅｕｓ Ｑｕａｒｚｇｌａｓ ＧｍｂＨ ＆ Ｃｏ． ＫＧ Ｅｕｖ照射下で膨張しないｅｕｖリソグラフィ用ミラーブランク

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016534959A (ja) * 2013-09-30 2016-11-10 ヘレーウス クヴァルツグラース ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフトＨｅｒａｅｕｓ Ｑｕａｒｚｇｌａｓ ＧｍｂＨ ＆ Ｃｏ． ＫＧ Ｅｕｖ照射下で膨張しないｅｕｖリソグラフィ用ミラーブランク
US10732519B2 (en) 2013-09-30 2020-08-04 Heraeus Quarzglas Gmbh & Co. Kg Mirror blank for EUV lithography without expansion under EUV radiation

Also Published As

Publication number Publication date
JPS5743535B2 (enrdf_load_stackoverflow) 1982-09-16

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