JPS5210064A - Transmission scanning particle beam microscope - Google Patents
Transmission scanning particle beam microscopeInfo
- Publication number
- JPS5210064A JPS5210064A JP51081445A JP8144576A JPS5210064A JP S5210064 A JPS5210064 A JP S5210064A JP 51081445 A JP51081445 A JP 51081445A JP 8144576 A JP8144576 A JP 8144576A JP S5210064 A JPS5210064 A JP S5210064A
- Authority
- JP
- Japan
- Prior art keywords
- particle beam
- beam microscope
- transmission scanning
- scanning particle
- transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 title 1
- 239000002245 particle Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/21—Focus adjustment
- H01J2237/216—Automatic focusing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19752530844 DE2530844C3 (de) | 1975-07-08 | Durchstrahlungs-Raster-Korpuskularstrahlmikroskop und Verfahren zum Betrieb |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5210064A true JPS5210064A (en) | 1977-01-26 |
Family
ID=5951178
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51081445A Pending JPS5210064A (en) | 1975-07-08 | 1976-07-08 | Transmission scanning particle beam microscope |
Country Status (4)
Country | Link |
---|---|
US (1) | US4038543A (ja) |
JP (1) | JPS5210064A (ja) |
GB (1) | GB1557226A (ja) |
NL (1) | NL7607507A (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7906632A (nl) * | 1979-09-05 | 1981-03-09 | Philips Nv | Automatische bundelcorrektie in stem. |
JPS56165255A (en) * | 1980-05-26 | 1981-12-18 | Hitachi Ltd | Image indicating method for transmission scan electron microscope |
US4567369A (en) * | 1982-06-18 | 1986-01-28 | National Research Development Corporation | Correction of astigmatism in electron beam instruments |
US4975578A (en) * | 1989-04-17 | 1990-12-04 | The Research Foundation Of State University Of Ny | Method and apparatus for determining distribution of mass density |
US5095207A (en) * | 1991-01-07 | 1992-03-10 | University Of Wisconsin - Milwaukee | Method of three-dimensional atomic imaging |
US5866905A (en) * | 1991-05-15 | 1999-02-02 | Hitachi, Ltd. | Electron microscope |
JP3285157B2 (ja) * | 1992-08-11 | 2002-05-27 | 科学技術振興事業団 | 位相情報観測方法及び位相情報観測用干渉装置 |
US5517033A (en) * | 1994-07-25 | 1996-05-14 | Gatan, Inc. | Apparatus for improved image resolution in electron microscopy |
US6365897B1 (en) | 1997-12-18 | 2002-04-02 | Nikon Corporation | Electron beam type inspection device and method of making same |
WO1999050651A1 (en) * | 1998-03-27 | 1999-10-07 | Hitachi, Ltd. | Pattern inspection device |
JP4074643B2 (ja) * | 2006-03-27 | 2008-04-09 | 株式会社アドバンテスト | 線幅測定調整方法及び走査型電子顕微鏡 |
EP1916696B1 (en) * | 2006-10-25 | 2017-04-19 | ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle detector assembly, charged particle beam apparatus and method for generating an image |
ITBO20070409A1 (it) * | 2007-06-11 | 2008-12-12 | C N R Consiglio Naz Delle Ri C | Dispositivo rivelatore per microscopio elettronico. |
US7952073B2 (en) * | 2008-08-01 | 2011-05-31 | Direct Electron, Lp | Apparatus and method including a direct bombardment detector and a secondary detector for use in electron microscopy |
JP5395864B2 (ja) * | 2011-09-14 | 2014-01-22 | 住友ゴム工業株式会社 | ゴム材料のシミュレーション方法 |
WO2018020626A1 (ja) * | 2016-07-28 | 2018-02-01 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1564658B2 (de) * | 1966-07-13 | 1971-04-29 | Siemens AG, 1000 Berlin u 8000 München | Verfahren zur fokussierung der objektivlinse eines korpus kularstrahlmikroskops insbesondere eines elektronenmikros kops |
US3908124A (en) * | 1974-07-01 | 1975-09-23 | Us Energy | Phase contrast in high resolution electron microscopy |
-
1976
- 1976-06-15 US US05/696,475 patent/US4038543A/en not_active Expired - Lifetime
- 1976-07-07 GB GB28193/76A patent/GB1557226A/en not_active Expired
- 1976-07-07 NL NL7607507A patent/NL7607507A/xx not_active Application Discontinuation
- 1976-07-08 JP JP51081445A patent/JPS5210064A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
GB1557226A (en) | 1979-12-05 |
NL7607507A (nl) | 1977-01-11 |
US4038543A (en) | 1977-07-26 |
DE2530844B2 (de) | 1977-04-28 |
DE2530844A1 (de) | 1977-01-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5227350A (en) | Transmission particle beam microscope | |
JPS53147458A (en) | Electron microscope | |
JPS5694681A (en) | Free electron laser | |
JPS55143766A (en) | Electron microscope | |
JPS5210064A (en) | Transmission scanning particle beam microscope | |
GB2020895B (en) | Scanning electron microscope | |
JPS55161344A (en) | Scan electron microscope | |
JPS51132758A (en) | Particle beam optical device | |
GB2002900B (en) | Scanning type electron microscope | |
JPS5227349A (en) | Transmission scanning particle beam microscope | |
JPS5238879A (en) | Particle beam device | |
EP0031579A3 (en) | Electron beam apparatus | |
GB2052843B (en) | Scanning electron microscope | |
JPS5238880A (en) | Transmission scanning electron microscope | |
JPS526462A (en) | Particle beam microscope | |
JPS54140455A (en) | Electron microscope | |
JPS5331955A (en) | Transmission scanning particle beam microscope | |
AU501917B2 (en) | Scanning beam system | |
JPS51123056A (en) | Scanning stereoscopic electron microscope | |
JPS5235977A (en) | Scanning particle beam microscope | |
JPS55133738A (en) | Device for moving electron beam | |
JPS5233469A (en) | Particle beam microscope | |
JPS5638757A (en) | Electron beam device | |
CA1035981A (en) | Light beam deflection means | |
JPS52122075A (en) | Charged particle beam scanning unit |