JPS51948A - Hotomasukuno seizohoho - Google Patents

Hotomasukuno seizohoho

Info

Publication number
JPS51948A
JPS51948A JP7028274A JP7028274A JPS51948A JP S51948 A JPS51948 A JP S51948A JP 7028274 A JP7028274 A JP 7028274A JP 7028274 A JP7028274 A JP 7028274A JP S51948 A JPS51948 A JP S51948A
Authority
JP
Japan
Prior art keywords
hotomasukuno
seizohoho
hotomasukuno seizohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7028274A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5411725B2 (enrdf_load_stackoverflow
Inventor
Satoshi Takeuchi
Satoru Matsumoto
Akira Kanaki
Susumu Tanida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP7028274A priority Critical patent/JPS51948A/ja
Publication of JPS51948A publication Critical patent/JPS51948A/ja
Publication of JPS5411725B2 publication Critical patent/JPS5411725B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP7028274A 1974-06-21 1974-06-21 Hotomasukuno seizohoho Granted JPS51948A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7028274A JPS51948A (en) 1974-06-21 1974-06-21 Hotomasukuno seizohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7028274A JPS51948A (en) 1974-06-21 1974-06-21 Hotomasukuno seizohoho

Publications (2)

Publication Number Publication Date
JPS51948A true JPS51948A (en) 1976-01-07
JPS5411725B2 JPS5411725B2 (enrdf_load_stackoverflow) 1979-05-17

Family

ID=13426966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7028274A Granted JPS51948A (en) 1974-06-21 1974-06-21 Hotomasukuno seizohoho

Country Status (1)

Country Link
JP (1) JPS51948A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5616676A (en) * 1979-07-21 1981-02-17 Hokuriku Denki Kogyo Kk Preparation of minute pattern
JPH03132662A (ja) * 1989-10-18 1991-06-06 Mitsubishi Electric Corp フォトマスク修正方法
JPH04116657A (ja) * 1990-09-07 1992-04-17 Mitsubishi Electric Corp フォトマスクの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879978A (enrdf_load_stackoverflow) * 1972-01-03 1973-10-26
JPS4953380A (enrdf_load_stackoverflow) * 1972-07-20 1974-05-23

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879978A (enrdf_load_stackoverflow) * 1972-01-03 1973-10-26
JPS4953380A (enrdf_load_stackoverflow) * 1972-07-20 1974-05-23

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5616676A (en) * 1979-07-21 1981-02-17 Hokuriku Denki Kogyo Kk Preparation of minute pattern
JPH03132662A (ja) * 1989-10-18 1991-06-06 Mitsubishi Electric Corp フォトマスク修正方法
JPH04116657A (ja) * 1990-09-07 1992-04-17 Mitsubishi Electric Corp フォトマスクの製造方法

Also Published As

Publication number Publication date
JPS5411725B2 (enrdf_load_stackoverflow) 1979-05-17

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