JPS5185380A - - Google Patents
Info
- Publication number
- JPS5185380A JPS5185380A JP6045575A JP6045575A JPS5185380A JP S5185380 A JPS5185380 A JP S5185380A JP 6045575 A JP6045575 A JP 6045575A JP 6045575 A JP6045575 A JP 6045575A JP S5185380 A JPS5185380 A JP S5185380A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6045575A JPS5185380A (fr) | 1975-05-21 | 1975-05-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6045575A JPS5185380A (fr) | 1975-05-21 | 1975-05-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5185380A true JPS5185380A (fr) | 1976-07-26 |
Family
ID=13142748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6045575A Pending JPS5185380A (fr) | 1975-05-21 | 1975-05-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5185380A (fr) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6195356A (ja) * | 1984-10-16 | 1986-05-14 | Mitsubishi Electric Corp | フオトマスクブランク |
JPS61173251A (ja) * | 1985-01-28 | 1986-08-04 | Mitsubishi Electric Corp | フオトマスクの製造方法 |
JPS61173252A (ja) * | 1985-01-28 | 1986-08-04 | Mitsubishi Electric Corp | フォトマスクブランクの形成方法 |
JPS61173250A (ja) * | 1985-01-28 | 1986-08-04 | Mitsubishi Electric Corp | フオトマスク材料 |
JPS6252550A (ja) * | 1985-08-30 | 1987-03-07 | Mitsubishi Electric Corp | フオトマスク材料 |
JPS6252551A (ja) * | 1985-08-30 | 1987-03-07 | Mitsubishi Electric Corp | フオトマスク材料 |
-
1975
- 1975-05-21 JP JP6045575A patent/JPS5185380A/ja active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6195356A (ja) * | 1984-10-16 | 1986-05-14 | Mitsubishi Electric Corp | フオトマスクブランク |
JPH0476101B2 (fr) * | 1984-10-16 | 1992-12-02 | Mitsubishi Electric Corp | |
JPS61173251A (ja) * | 1985-01-28 | 1986-08-04 | Mitsubishi Electric Corp | フオトマスクの製造方法 |
JPS61173252A (ja) * | 1985-01-28 | 1986-08-04 | Mitsubishi Electric Corp | フォトマスクブランクの形成方法 |
JPS61173250A (ja) * | 1985-01-28 | 1986-08-04 | Mitsubishi Electric Corp | フオトマスク材料 |
JPH0434141B2 (fr) * | 1985-01-28 | 1992-06-05 | Mitsubishi Electric Corp | |
JPH0434142B2 (fr) * | 1985-01-28 | 1992-06-05 | Mitsubishi Electric Corp | |
JPS6252550A (ja) * | 1985-08-30 | 1987-03-07 | Mitsubishi Electric Corp | フオトマスク材料 |
JPS6252551A (ja) * | 1985-08-30 | 1987-03-07 | Mitsubishi Electric Corp | フオトマスク材料 |
JPH0435743B2 (fr) * | 1985-08-30 | 1992-06-12 | Mitsubishi Electric Corp | |
JPH0469933B2 (fr) * | 1985-08-30 | 1992-11-09 | Mitsubishi Electric Corp |