JPS5177352A - - Google Patents

Info

Publication number
JPS5177352A
JPS5177352A JP50140353A JP14035375A JPS5177352A JP S5177352 A JPS5177352 A JP S5177352A JP 50140353 A JP50140353 A JP 50140353A JP 14035375 A JP14035375 A JP 14035375A JP S5177352 A JPS5177352 A JP S5177352A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50140353A
Inventor
Bii Jipin Richaado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bendix Corp
Original Assignee
Bendix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bendix Corp filed Critical Bendix Corp
Publication of JPS5177352A publication Critical patent/JPS5177352A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP50140353A 1974-11-25 1975-11-25 Pending JPS5177352A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/526,778 US3957378A (en) 1974-11-25 1974-11-25 Two-axis moire fringe displacement transducer

Publications (1)

Publication Number Publication Date
JPS5177352A true JPS5177352A (ja) 1976-07-05

Family

ID=24098762

Family Applications (2)

Application Number Title Priority Date Filing Date
JP50140353A Pending JPS5177352A (ja) 1974-11-25 1975-11-25
JP1984085614U Pending JPS6025912U (ja) 1974-11-25 1984-06-11 変位変換器

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP1984085614U Pending JPS6025912U (ja) 1974-11-25 1984-06-11 変位変換器

Country Status (6)

Country Link
US (1) US3957378A (ja)
JP (2) JPS5177352A (ja)
CA (1) CA1028144A (ja)
DE (1) DE2550840C2 (ja)
FR (1) FR2292215A1 (ja)
GB (1) GB1513898A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60250201A (ja) * 1984-05-25 1985-12-10 Agency Of Ind Science & Technol 投影像の二次元的な変位測定装置

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4546347A (en) * 1981-05-18 1985-10-08 Mouse Systems Corporation Detector for electro-optical mouse
DE3234470C2 (de) * 1982-09-17 1985-11-21 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf
DE3234471C1 (de) * 1982-09-17 1983-08-25 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf
US4782327A (en) * 1985-01-02 1988-11-01 Victor B. Kley Computer control
US4984287A (en) * 1988-11-15 1991-01-08 Msc Technologies, Inc. Method for orienting a dual mouse optical scanner
US4942621A (en) * 1988-11-15 1990-07-17 Msc Technologies, Inc. Method for mapping scanned pixel data
DE58901190D1 (de) * 1989-04-12 1992-05-21 Landis & Gyr Betriebs Ag Anordnung zur messung einer spurabweichung einer bewegbaren folienbahn.
US5390424A (en) * 1990-01-25 1995-02-21 Renishaw Metrology Limited Analogue probe
US5052807A (en) * 1990-06-28 1991-10-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Three dimensional moire pattern alignment
US5390423A (en) * 1991-01-22 1995-02-21 Renishaw Plc Analogue probe
DE4105433C2 (de) * 1991-02-21 1994-05-19 Heidenhain Gmbh Dr Johannes Einrichtung zur Konturformprüfung an einer Bearbeitungs- oder Meßmaschine
US5204524A (en) * 1991-03-22 1993-04-20 Mitutoyo Corporation Two-dimensional optical encoder with three gratings in each dimension
US6660997B2 (en) 2001-04-26 2003-12-09 Creo Srl Absolute position Moiré type encoder for use in a control system
US7256871B2 (en) * 2004-07-27 2007-08-14 Asml Netherlands B.V. Lithographic apparatus and method for calibrating the same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1220152B (de) * 1963-08-23 1966-06-30 Wenczler & Heidenhain Vorrichtung zum verkantungsfehlerfreien Messen von Laengen
US3330964A (en) * 1963-09-09 1967-07-11 Itck Corp Photoelectric coordinate measuring system
US3578979A (en) * 1968-04-23 1971-05-18 Tajima Seisakusho Kk Electrical signal generating apparatus having a scale grid
DE2003492A1 (de) * 1970-01-27 1971-08-12 Leitz Ernst Gmbh Messverfahren fuer Schrittgeber zum Messen von Laengen oder Winkeln sowie Anordnungen zur Durchfuehrung dieses Messverfahrens
GB1383744A (en) * 1971-06-01 1974-02-12 Ferranti Ltd Indicating devices
US3768911A (en) * 1971-08-17 1973-10-30 Keuffel & Esser Co Electro-optical incremental motion and position indicator
US3806254A (en) * 1971-12-08 1974-04-23 Information Storage Systems Agc servo system having error signal responsive to a non-extinguishable intensity light energy signal
US3867038A (en) * 1972-11-27 1975-02-18 Baird Atomic Inc Optical alignment system
GB1443220A (en) * 1972-12-19 1976-07-21 Leitz Ernst Gmbh Photo-electric incremental transducer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60250201A (ja) * 1984-05-25 1985-12-10 Agency Of Ind Science & Technol 投影像の二次元的な変位測定装置

Also Published As

Publication number Publication date
FR2292215B1 (ja) 1978-05-12
FR2292215A1 (fr) 1976-06-18
DE2550840A1 (de) 1976-05-26
DE2550840C2 (de) 1984-07-26
US3957378A (en) 1976-05-18
CA1028144A (en) 1978-03-21
GB1513898A (en) 1978-06-14
JPS6025912U (ja) 1985-02-21

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