JPS5165958A - - Google Patents
Info
- Publication number
- JPS5165958A JPS5165958A JP50129433A JP12943375A JPS5165958A JP S5165958 A JPS5165958 A JP S5165958A JP 50129433 A JP50129433 A JP 50129433A JP 12943375 A JP12943375 A JP 12943375A JP S5165958 A JPS5165958 A JP S5165958A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1086—Beam splitting or combining systems operating by diffraction only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19742451668 DE2451668A1 (de) | 1974-10-31 | 1974-10-31 | Anordnung zur geometrischen trennung von lichtfluessen in abbildungssystemen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5165958A true JPS5165958A (ja) | 1976-06-08 |
Family
ID=5929641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50129433A Pending JPS5165958A (ja) | 1974-10-31 | 1975-10-29 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4222633A (ja) |
| JP (1) | JPS5165958A (ja) |
| DE (1) | DE2451668A1 (ja) |
| FR (1) | FR2289930A1 (ja) |
| NL (1) | NL7512787A (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6112016U (ja) * | 1984-06-27 | 1986-01-24 | 株式会社ミツトヨ | 格子干渉型変位検出装置 |
| JPS61176817A (ja) * | 1985-01-31 | 1986-08-08 | Foster Denki Kk | エンコ−ダ |
| JPS62163926A (ja) * | 1986-01-14 | 1987-07-20 | Canon Inc | リニアエンコ−ダ− |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55101922A (en) * | 1979-01-31 | 1980-08-04 | Canon Inc | Light splitter |
| GB8615196D0 (en) * | 1986-06-21 | 1986-07-23 | Renishaw Plc | Opto-electronic scale reading apparatus |
| US4808807A (en) * | 1986-12-04 | 1989-02-28 | General Signal Corp. | Optical focus sensor system |
| US5064290A (en) * | 1987-12-12 | 1991-11-12 | Renishaw Plc | Opto-electronic scale-reading apparatus wherein phase-separated secondary orders of diffraction are generated |
| JPH03505633A (ja) * | 1989-04-15 | 1991-12-05 | レニショウ パブリック リミテッド カンパニー | 光電スケール読取装置 |
| US5519492A (en) * | 1992-06-27 | 1996-05-21 | Dr. Johannes Heidenhain Gmbh | Optical arrangement for detecting the intensity modulation of partial ray beams |
| DE9218275U1 (de) * | 1992-06-27 | 1993-11-04 | Dr. Johannes Heidenhain Gmbh, 83301 Traunreut | Lichtelektrische Längen- oder Winkelmeßeinrichtung |
| DE19652563A1 (de) * | 1996-12-17 | 1998-06-18 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Positionsmeßeinrichtung |
| SG75127A1 (en) * | 1997-06-30 | 2000-09-19 | Canon Kk | Displacement information detecting apparatus |
| KR20040060509A (ko) * | 2002-12-30 | 2004-07-06 | 동부전자 주식회사 | Ｃｍｏｓ 이미지 센서 |
| JP4287671B2 (ja) * | 2003-02-19 | 2009-07-01 | 株式会社日立ハイテクノロジーズ | 測長用標準部材およびその作製方法、並びにそれを用いた電子ビーム測長装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL224249A (ja) * | 1958-01-21 | |||
| CH457204A (de) * | 1966-07-21 | 1968-05-31 | Leitz Ernst Gmbh | Fotoelektrischer Schrittgeber |
| DE1548707C3 (de) * | 1966-07-26 | 1979-02-15 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Fotoelektrischer Schrittgeber |
| NL6900491A (ja) * | 1969-01-11 | 1970-07-14 | ||
| DE2003492A1 (de) * | 1970-01-27 | 1971-08-12 | Leitz Ernst Gmbh | Messverfahren fuer Schrittgeber zum Messen von Laengen oder Winkeln sowie Anordnungen zur Durchfuehrung dieses Messverfahrens |
-
1974
- 1974-10-31 DE DE19742451668 patent/DE2451668A1/de not_active Withdrawn
-
1975
- 1975-10-29 JP JP50129433A patent/JPS5165958A/ja active Pending
- 1975-10-29 FR FR7533086A patent/FR2289930A1/fr active Granted
- 1975-10-31 NL NL7512787A patent/NL7512787A/xx unknown
-
1978
- 1978-06-14 US US05/915,320 patent/US4222633A/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6112016U (ja) * | 1984-06-27 | 1986-01-24 | 株式会社ミツトヨ | 格子干渉型変位検出装置 |
| JPH044974Y2 (ja) * | 1984-06-27 | 1992-02-13 | ||
| JPS61176817A (ja) * | 1985-01-31 | 1986-08-08 | Foster Denki Kk | エンコ−ダ |
| JPS62163926A (ja) * | 1986-01-14 | 1987-07-20 | Canon Inc | リニアエンコ−ダ− |
Also Published As
| Publication number | Publication date |
|---|---|
| US4222633A (en) | 1980-09-16 |
| FR2289930A1 (fr) | 1976-05-28 |
| FR2289930B3 (ja) | 1979-09-14 |
| NL7512787A (nl) | 1976-05-04 |
| DE2451668A1 (de) | 1976-05-06 |