JPS5142465A - Kinitsunidoopusareta handotaitanketsushobonoseizohoho - Google Patents
Kinitsunidoopusareta handotaitanketsushobonoseizohohoInfo
- Publication number
- JPS5142465A JPS5142465A JP9741575A JP9741575A JPS5142465A JP S5142465 A JPS5142465 A JP S5142465A JP 9741575 A JP9741575 A JP 9741575A JP 9741575 A JP9741575 A JP 9741575A JP S5142465 A JPS5142465 A JP S5142465A
- Authority
- JP
- Japan
- Prior art keywords
- kinitsunidoopusareta
- handotaitanketsushobonoseizohoho
- kinitsunidoopusareta handotaitanketsushobonoseizohoho
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19742438852 DE2438852C3 (de) | 1974-08-13 | 1974-08-13 | Verfahren zum Herstellen von homogen-dotierten Halbleitereinkristallstäben |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5142465A true JPS5142465A (ja) | 1976-04-10 |
Family
ID=5923114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9741575A Pending JPS5142465A (ja) | 1974-08-13 | 1975-08-11 | Kinitsunidoopusareta handotaitanketsushobonoseizohoho |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS5142465A (ja) |
DE (1) | DE2438852C3 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5494478A (en) * | 1977-12-30 | 1979-07-26 | Wacker Chemitronic | Manufacture of high purity silicon single crystal |
JP2000327476A (ja) * | 1999-05-24 | 2000-11-28 | Komatsu Electronic Metals Co Ltd | 半導体単結晶製造装置および製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3498846A (en) * | 1967-03-03 | 1970-03-03 | Siemens Ag | Method of growing a rod-shaped monocrystal of semiconductor material by crucible-free floating zone melting |
-
1974
- 1974-08-13 DE DE19742438852 patent/DE2438852C3/de not_active Expired
-
1975
- 1975-08-11 JP JP9741575A patent/JPS5142465A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3498846A (en) * | 1967-03-03 | 1970-03-03 | Siemens Ag | Method of growing a rod-shaped monocrystal of semiconductor material by crucible-free floating zone melting |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5494478A (en) * | 1977-12-30 | 1979-07-26 | Wacker Chemitronic | Manufacture of high purity silicon single crystal |
JPS5727077B2 (ja) * | 1977-12-30 | 1982-06-08 | ||
JP2000327476A (ja) * | 1999-05-24 | 2000-11-28 | Komatsu Electronic Metals Co Ltd | 半導体単結晶製造装置および製造方法 |
JP4521621B2 (ja) * | 1999-05-24 | 2010-08-11 | Sumco Techxiv株式会社 | 半導体単結晶製造方法 |
Also Published As
Publication number | Publication date |
---|---|
DE2438852C3 (de) | 1980-02-07 |
DE2438852A1 (de) | 1976-02-26 |
DE2438852B2 (de) | 1979-05-23 |
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