JPS5141964A - - Google Patents
Info
- Publication number
- JPS5141964A JPS5141964A JP49115359A JP11535974A JPS5141964A JP S5141964 A JPS5141964 A JP S5141964A JP 49115359 A JP49115359 A JP 49115359A JP 11535974 A JP11535974 A JP 11535974A JP S5141964 A JPS5141964 A JP S5141964A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49115359A JPS5932895B2 (ja) | 1974-10-07 | 1974-10-07 | 半導体装置およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49115359A JPS5932895B2 (ja) | 1974-10-07 | 1974-10-07 | 半導体装置およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5141964A true JPS5141964A (ja) | 1976-04-08 |
| JPS5932895B2 JPS5932895B2 (ja) | 1984-08-11 |
Family
ID=14660565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49115359A Expired JPS5932895B2 (ja) | 1974-10-07 | 1974-10-07 | 半導体装置およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5932895B2 (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5558555A (en) * | 1978-10-25 | 1980-05-01 | Hitachi Ltd | Electronic device and its manufacture |
| JPS5846652A (ja) * | 1981-09-14 | 1983-03-18 | Fujitsu Ltd | 多層配線形成方法 |
| JPS58101439A (ja) * | 1981-12-12 | 1983-06-16 | Toshiba Corp | 半導体装置の製造方法 |
| JPS6254042A (ja) * | 1985-09-03 | 1987-03-09 | Mitsubishi Chem Ind Ltd | 光磁気ディスク用磁性金属材料の製造方法 |
| JPH01283339A (ja) * | 1988-02-29 | 1989-11-14 | General Motors Corp <Gm> | 鉄合金物品の製造方法 |
| JPH0541373A (ja) * | 1991-08-06 | 1993-02-19 | Nec Kyushu Ltd | 半導体装置の製造方法 |
-
1974
- 1974-10-07 JP JP49115359A patent/JPS5932895B2/ja not_active Expired
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5558555A (en) * | 1978-10-25 | 1980-05-01 | Hitachi Ltd | Electronic device and its manufacture |
| JPS6153858B2 (ja) * | 1978-10-25 | 1986-11-19 | Hitachi Ltd | |
| JPS5846652A (ja) * | 1981-09-14 | 1983-03-18 | Fujitsu Ltd | 多層配線形成方法 |
| JPS6314498B2 (ja) * | 1981-09-14 | 1988-03-31 | Fujitsu Ltd | |
| JPS58101439A (ja) * | 1981-12-12 | 1983-06-16 | Toshiba Corp | 半導体装置の製造方法 |
| JPS6351385B2 (ja) * | 1981-12-12 | 1988-10-13 | Tokyo Shibaura Electric Co | |
| JPS6254042A (ja) * | 1985-09-03 | 1987-03-09 | Mitsubishi Chem Ind Ltd | 光磁気ディスク用磁性金属材料の製造方法 |
| JPH01283339A (ja) * | 1988-02-29 | 1989-11-14 | General Motors Corp <Gm> | 鉄合金物品の製造方法 |
| JPH0541373A (ja) * | 1991-08-06 | 1993-02-19 | Nec Kyushu Ltd | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5932895B2 (ja) | 1984-08-11 |