JPS5140875B2 - - Google Patents

Info

Publication number
JPS5140875B2
JPS5140875B2 JP1597372A JP1597372A JPS5140875B2 JP S5140875 B2 JPS5140875 B2 JP S5140875B2 JP 1597372 A JP1597372 A JP 1597372A JP 1597372 A JP1597372 A JP 1597372A JP S5140875 B2 JPS5140875 B2 JP S5140875B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1597372A
Other languages
Japanese (ja)
Other versions
JPS4884784A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1597372A priority Critical patent/JPS5140875B2/ja
Publication of JPS4884784A publication Critical patent/JPS4884784A/ja
Publication of JPS5140875B2 publication Critical patent/JPS5140875B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1597372A 1972-02-17 1972-02-17 Expired JPS5140875B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1597372A JPS5140875B2 (enrdf_load_stackoverflow) 1972-02-17 1972-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1597372A JPS5140875B2 (enrdf_load_stackoverflow) 1972-02-17 1972-02-17

Publications (2)

Publication Number Publication Date
JPS4884784A JPS4884784A (enrdf_load_stackoverflow) 1973-11-10
JPS5140875B2 true JPS5140875B2 (enrdf_load_stackoverflow) 1976-11-06

Family

ID=11903637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1597372A Expired JPS5140875B2 (enrdf_load_stackoverflow) 1972-02-17 1972-02-17

Country Status (1)

Country Link
JP (1) JPS5140875B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50133936A (enrdf_load_stackoverflow) * 1974-04-15 1975-10-23
JPS50161475A (enrdf_load_stackoverflow) * 1974-06-20 1975-12-27
JPS5197544A (en) * 1975-02-26 1976-08-27 Kuroomuhimakuno keiseihoho
DE2757374C2 (de) * 1977-12-22 1984-06-28 Siemens AG, 1000 Berlin und 8000 München Verfahren zum kontinuierlichen Beschichten eines für Bürstenkontakte in elektrischen Maschinen geeigneten Graphitkörpers sowie Vorrichtung zur Durchführung dieses Verfahrens
JPS5648559U (enrdf_load_stackoverflow) * 1980-09-04 1981-04-30
JPS61174371A (ja) * 1985-01-28 1986-08-06 Hitachi Ltd 薄膜作成装置
JPS61217571A (ja) * 1985-03-25 1986-09-27 Hitachi Ltd 薄膜形成装置

Also Published As

Publication number Publication date
JPS4884784A (enrdf_load_stackoverflow) 1973-11-10

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