JPS5140874A - - Google Patents
Info
- Publication number
- JPS5140874A JPS5140874A JP11452474A JP11452474A JPS5140874A JP S5140874 A JPS5140874 A JP S5140874A JP 11452474 A JP11452474 A JP 11452474A JP 11452474 A JP11452474 A JP 11452474A JP S5140874 A JPS5140874 A JP S5140874A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11452474A JPS5621147B2 (pt) | 1974-10-04 | 1974-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11452474A JPS5621147B2 (pt) | 1974-10-04 | 1974-10-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5140874A true JPS5140874A (pt) | 1976-04-06 |
| JPS5621147B2 JPS5621147B2 (pt) | 1981-05-18 |
Family
ID=14639899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11452474A Expired JPS5621147B2 (pt) | 1974-10-04 | 1974-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5621147B2 (pt) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57147634A (en) * | 1981-03-09 | 1982-09-11 | Hoya Corp | Photomask blank |
| JPS57150214U (pt) * | 1981-03-16 | 1982-09-21 | ||
| JPS57161727A (en) * | 1981-03-30 | 1982-10-05 | Ricoh Co Ltd | Manufacture of electrochromatic film |
| JPS6090336A (ja) * | 1983-10-24 | 1985-05-21 | Toppan Printing Co Ltd | クロムマスクブランクの製造方法 |
| JPS61170743A (ja) * | 1985-01-25 | 1986-08-01 | Toppan Printing Co Ltd | フオトマスクブランクの製造法 |
| JPS61176934A (ja) * | 1985-01-31 | 1986-08-08 | Toppan Printing Co Ltd | フオトマスクブランクの製造方法 |
| JPS6428644A (en) * | 1987-07-23 | 1989-01-31 | Toppan Printing Co Ltd | Production of photomask blank |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4936275A (pt) * | 1972-08-04 | 1974-04-04 | ||
| JPS4953380A (pt) * | 1972-07-20 | 1974-05-23 |
-
1974
- 1974-10-04 JP JP11452474A patent/JPS5621147B2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4953380A (pt) * | 1972-07-20 | 1974-05-23 | ||
| JPS4936275A (pt) * | 1972-08-04 | 1974-04-04 |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57147634A (en) * | 1981-03-09 | 1982-09-11 | Hoya Corp | Photomask blank |
| JPS6217744B2 (pt) * | 1981-03-09 | 1987-04-20 | Hoya Corp | |
| JPS57150214U (pt) * | 1981-03-16 | 1982-09-21 | ||
| JPS628331Y2 (pt) * | 1981-03-16 | 1987-02-26 | ||
| JPS57161727A (en) * | 1981-03-30 | 1982-10-05 | Ricoh Co Ltd | Manufacture of electrochromatic film |
| JPH0357457B2 (pt) * | 1981-03-30 | 1991-09-02 | Rikoo Kk | |
| JPS6090336A (ja) * | 1983-10-24 | 1985-05-21 | Toppan Printing Co Ltd | クロムマスクブランクの製造方法 |
| JPH041339B2 (pt) * | 1983-10-24 | 1992-01-10 | Toppan Printing Co Ltd | |
| JPS61170743A (ja) * | 1985-01-25 | 1986-08-01 | Toppan Printing Co Ltd | フオトマスクブランクの製造法 |
| JPH0414340B2 (pt) * | 1985-01-25 | 1992-03-12 | Toppan Printing Co Ltd | |
| JPS61176934A (ja) * | 1985-01-31 | 1986-08-08 | Toppan Printing Co Ltd | フオトマスクブランクの製造方法 |
| JPS6428644A (en) * | 1987-07-23 | 1989-01-31 | Toppan Printing Co Ltd | Production of photomask blank |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5621147B2 (pt) | 1981-05-18 |