JPS5123950B1 - - Google Patents

Info

Publication number
JPS5123950B1
JPS5123950B1 JP9797470A JP9797470A JPS5123950B1 JP S5123950 B1 JPS5123950 B1 JP S5123950B1 JP 9797470 A JP9797470 A JP 9797470A JP 9797470 A JP9797470 A JP 9797470A JP S5123950 B1 JPS5123950 B1 JP S5123950B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9797470A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19702004184 external-priority patent/DE2004184C3/de
Application filed filed Critical
Publication of JPS5123950B1 publication Critical patent/JPS5123950B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
JP9797470A 1970-01-30 1970-11-09 Pending JPS5123950B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702004184 DE2004184C3 (de) 1970-01-30 Verfahren und Vorrichtung zum Aufdampfen von Metallen oder Metallverbindungen auf einem Träger im Vakuum mit Hilfe einer Elektronenstrahlkanone

Publications (1)

Publication Number Publication Date
JPS5123950B1 true JPS5123950B1 (de) 1976-07-20

Family

ID=5760947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9797470A Pending JPS5123950B1 (de) 1970-01-30 1970-11-09

Country Status (5)

Country Link
JP (1) JPS5123950B1 (de)
CH (1) CH544157A (de)
FR (1) FR2075059A5 (de)
GB (1) GB1334599A (de)
NL (1) NL7101237A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019225540A1 (ja) 2018-05-21 2019-11-28 旭化成株式会社 ポリカーボネートジオール

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60225422A (ja) * 1984-04-24 1985-11-09 Hitachi Ltd 薄膜形成方法およびその装置
GB2264718B (en) * 1992-03-04 1995-04-26 Univ Hull Coatings produced by vapour deposition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019225540A1 (ja) 2018-05-21 2019-11-28 旭化成株式会社 ポリカーボネートジオール

Also Published As

Publication number Publication date
CH544157A (de) 1973-11-15
FR2075059A5 (de) 1971-10-08
GB1334599A (en) 1973-10-24
NL7101237A (de) 1971-08-03
DE2004184B2 (de) 1975-07-03
DE2004184A1 (de) 1971-08-05

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