JPS5119996B1 - - Google Patents
Info
- Publication number
- JPS5119996B1 JPS5119996B1 JP47008810A JP881072A JPS5119996B1 JP S5119996 B1 JPS5119996 B1 JP S5119996B1 JP 47008810 A JP47008810 A JP 47008810A JP 881072 A JP881072 A JP 881072A JP S5119996 B1 JPS5119996 B1 JP S5119996B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
- G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02011—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal polarization variation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/40—Non-mechanical variable delay line
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10922071A | 1971-01-25 | 1971-01-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5119996B1 true JPS5119996B1 (ja) | 1976-06-22 |
Family
ID=22326450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP47008810A Pending JPS5119996B1 (ja) | 1971-01-25 | 1972-01-25 |
Country Status (8)
Country | Link |
---|---|
US (1) | US3694088A (ja) |
JP (1) | JPS5119996B1 (ja) |
BE (1) | BE778402A (ja) |
CH (1) | CH562445A5 (ja) |
DD (1) | DD96779A5 (ja) |
DE (1) | DE2201830B2 (ja) |
FR (1) | FR2124822A5 (ja) |
GB (1) | GB1363775A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017519987A (ja) * | 2014-06-16 | 2017-07-20 | コミサリヤ・ア・レネルジ・アトミク・エ・オ・エネルジ・アルテルナテイブ | 光ビームの特性評価のためのデバイスおよび方法 |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3836256A (en) * | 1972-05-08 | 1974-09-17 | Perkin Elmer Corp | Interferometer for testing telescope optics |
US3950103A (en) * | 1972-10-27 | 1976-04-13 | Canadian Patents And Development Limited | Method and apparatus to determine spatial distribution of magnitude and phase of electro-magnetic fields especially optical fields |
US3938892A (en) * | 1973-04-24 | 1976-02-17 | The United States Of America As Represented By The United States National Aeronautics And Space Administration | Electronic optical transfer function analyzer |
US4169980A (en) * | 1977-04-19 | 1979-10-02 | Zygo Corporation | Method and apparatus for interference fringe center sensing |
US4225240A (en) * | 1978-06-05 | 1980-09-30 | Balasubramanian N | Method and system for determining interferometric optical path length difference |
FR2433205A1 (fr) * | 1978-08-08 | 1980-03-07 | Anvar | Procede et dispositif d'interpolation des franges d'interference |
US4340304A (en) * | 1978-08-11 | 1982-07-20 | Rockwell International Corporation | Interferometric method and system |
US4213697A (en) * | 1978-11-06 | 1980-07-22 | The United States Of America As Represented By The Secretary Of The Army | Phase measuring device |
DE2916202A1 (de) * | 1979-04-21 | 1980-10-23 | Ibm Deutschland | Verfahren zur analyse des polarisationszustandes einer strahlung und vorrichtung zur durchfuehrung des verfahrens |
US4387994A (en) * | 1980-02-04 | 1983-06-14 | Balasubramanian N | Optical system for surface topography measurement |
US4340306A (en) * | 1980-02-04 | 1982-07-20 | Balasubramanian N | Optical system for surface topography measurement |
FR2483609A1 (fr) * | 1980-05-30 | 1981-12-04 | Balasubramanian N | Dispositif et procede de determination interferometrique d'une difference de longueur de chemin optique |
NL8005258A (nl) * | 1980-09-22 | 1982-04-16 | Philips Nv | Interferometer. |
EP0062083B1 (de) * | 1981-04-04 | 1985-11-27 | Ibm Deutschland Gmbh | Einrichtung zur Bestimmung des Polarisationszustandes eines Lichtwellenfeldes und Verwendungen der Einrichtung zu interferometrischen und holographischen Messungen |
US4594003A (en) * | 1983-07-20 | 1986-06-10 | Zygo Corporation | Interferometric wavefront measurement |
US4606638A (en) * | 1983-11-03 | 1986-08-19 | Zygo Corporation | Distance measuring interferometer and method of use |
US4639139A (en) * | 1985-09-27 | 1987-01-27 | Wyko Corporation | Optical profiler using improved phase shifting interferometry |
US4832489A (en) * | 1986-03-19 | 1989-05-23 | Wyko Corporation | Two-wavelength phase-shifting interferometer and method |
US4735507A (en) * | 1986-07-11 | 1988-04-05 | The Perkin-Elmer Corporation | Imaging coherent radiometer |
GB8820761D0 (en) * | 1988-09-02 | 1988-10-05 | Tyrer J R | Interferometry |
US5042949A (en) * | 1989-03-17 | 1991-08-27 | Greenberg Jeffrey S | Optical profiler for films and substrates |
US5286313A (en) * | 1991-10-31 | 1994-02-15 | Surface Combustion, Inc. | Process control system using polarizing interferometer |
US5604592A (en) | 1994-09-19 | 1997-02-18 | Textron Defense Systems, Division Of Avco Corporation | Laser ultrasonics-based material analysis system and method using matched filter processing |
US5724138A (en) * | 1996-04-18 | 1998-03-03 | Textron Systems Corporation | Wavelet analysis for laser ultrasonic measurement of material properties |
US5721616A (en) * | 1996-04-24 | 1998-02-24 | Zygo Corporation | Tilt free micromotion translator |
US6438272B1 (en) | 1997-12-31 | 2002-08-20 | The Research Foundation Of State University Of Ny | Method and apparatus for three dimensional surface contouring using a digital video projection system |
US6788210B1 (en) | 1999-09-16 | 2004-09-07 | The Research Foundation Of State University Of New York | Method and apparatus for three dimensional surface contouring and ranging using a digital video projection system |
US6819435B2 (en) * | 2000-04-12 | 2004-11-16 | Nano Or Technologies Inc. | Spatial and spectral wavefront analysis and measurement |
JP2002071515A (ja) * | 2000-08-31 | 2002-03-08 | Canon Inc | 測定装置及び測定方法 |
AU2002230068A1 (en) * | 2001-02-06 | 2002-08-19 | Nano-Or Technologies (Israel) Ltd. | Multiple layer optical storage device |
DE10130902A1 (de) * | 2001-06-27 | 2003-01-16 | Zeiss Carl | Interferometersystem, Verfahren zum Aufnehmen eines Interferogramms und Verfahren zum Bereitstellen und Herstellen eines Objekts mit einer Soll-Oberfläche |
EP1476715B1 (en) * | 2002-01-24 | 2018-10-10 | Icos Vision Systems N.V. | Improved spatial wavefront analysis and 3d measurement |
HUP0203993A2 (hu) * | 2002-11-19 | 2004-08-30 | László Domján | Binokuláris videoszemüveg optikai rendszere |
US7187431B2 (en) * | 2004-11-16 | 2007-03-06 | Asml Netherlands B.V. | Lithographic apparatus, method of determining properties thereof and computer program |
GB2431986A (en) * | 2005-11-03 | 2007-05-09 | Isis Innovation | Detecting the local slope and orientation of a wavefront from the changes in an interference pattern caused by the rotation of a shearing element |
CN100460857C (zh) * | 2006-04-13 | 2009-02-11 | 中山大学 | 一种基于动态稳定扫描技术的傅里叶光谱仪 |
WO2014050141A1 (ja) * | 2012-09-27 | 2014-04-03 | 国立大学法人北海道大学 | 光位相測定方法、光位相測定装置および光通信装置 |
GB2542622A (en) * | 2015-09-28 | 2017-03-29 | Cambridge Entpr Ltd | Method and apparatus for performing complex fourier transforms |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3127465A (en) * | 1961-01-16 | 1964-03-31 | Gen Precision Inc | Three-phase interferometer |
US3527537A (en) * | 1968-02-09 | 1970-09-08 | Itek Corp | Automatic correlating interferometer |
-
1971
- 1971-01-25 US US109220A patent/US3694088A/en not_active Expired - Lifetime
-
1972
- 1972-01-14 CH CH56672A patent/CH562445A5/xx not_active IP Right Cessation
- 1972-01-15 DE DE19722201830 patent/DE2201830B2/de active Granted
- 1972-01-24 FR FR7202266A patent/FR2124822A5/fr not_active Expired
- 1972-01-24 BE BE778402A patent/BE778402A/xx not_active IP Right Cessation
- 1972-01-24 GB GB319372A patent/GB1363775A/en not_active Expired
- 1972-01-25 JP JP47008810A patent/JPS5119996B1/ja active Pending
- 1972-01-25 DD DD160497A patent/DD96779A5/xx unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017519987A (ja) * | 2014-06-16 | 2017-07-20 | コミサリヤ・ア・レネルジ・アトミク・エ・オ・エネルジ・アルテルナテイブ | 光ビームの特性評価のためのデバイスおよび方法 |
Also Published As
Publication number | Publication date |
---|---|
BE778402A (fr) | 1972-05-16 |
FR2124822A5 (ja) | 1972-09-22 |
GB1363775A (en) | 1974-08-14 |
DD96779A5 (ja) | 1973-04-05 |
DE2201830C3 (ja) | 1978-05-24 |
US3694088A (en) | 1972-09-26 |
CH562445A5 (ja) | 1975-05-30 |
DE2201830B2 (de) | 1977-09-29 |
DE2201830A1 (de) | 1972-08-10 |