DE2201830A1 - Verfahren und Vorrichtung zur Wellenfrontmessung - Google Patents

Verfahren und Vorrichtung zur Wellenfrontmessung

Info

Publication number
DE2201830A1
DE2201830A1 DE19722201830 DE2201830A DE2201830A1 DE 2201830 A1 DE2201830 A1 DE 2201830A1 DE 19722201830 DE19722201830 DE 19722201830 DE 2201830 A DE2201830 A DE 2201830A DE 2201830 A1 DE2201830 A1 DE 2201830A1
Authority
DE
Germany
Prior art keywords
wavefront measurement
wavefront
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19722201830
Other languages
English (en)
Other versions
DE2201830C3 (de
DE2201830B2 (de
Inventor
Gallagher John Everett
Herriott Donald Richard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US10922071A priority Critical
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of DE2201830A1 publication Critical patent/DE2201830A1/de
Publication of DE2201830B2 publication Critical patent/DE2201830B2/de
Application granted granted Critical
Publication of DE2201830C3 publication Critical patent/DE2201830C3/de
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means
    • G01B9/02Interferometers for determining dimensional properties of, or relations between, measurement objects
    • G01B9/02034Interferometers for determining dimensional properties of, or relations between, measurement objects characterised by particularly shaped beams or wavefronts
    • G01B9/02038Shaping the wavefront, e.g. generating a spherical wavefront
    • G01B9/02039Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means
    • G01B9/02Interferometers for determining dimensional properties of, or relations between, measurement objects
    • G01B9/02001Interferometers for determining dimensional properties of, or relations between, measurement objects characterised by manipulating or generating specific radiation properties
    • G01B9/02011Interferometers for determining dimensional properties of, or relations between, measurement objects characterised by manipulating or generating specific radiation properties using temporal polarization variation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/40Non-mechanical variable delay line
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70Using polarization in the interferometer
DE19722201830 1971-01-25 1972-01-15 Expired DE2201830C3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10922071A true 1971-01-25 1971-01-25

Publications (3)

Publication Number Publication Date
DE2201830A1 true DE2201830A1 (de) 1972-08-10
DE2201830B2 DE2201830B2 (de) 1977-09-29
DE2201830C3 DE2201830C3 (de) 1978-05-24

Family

ID=22326450

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722201830 Expired DE2201830C3 (de) 1971-01-25 1972-01-15

Country Status (8)

Country Link
US (1) US3694088A (de)
JP (1) JPS5119996B1 (de)
BE (1) BE778402A (de)
CH (1) CH562445A5 (de)
DD (1) DD96779A5 (de)
DE (1) DE2201830C3 (de)
FR (1) FR2124822A5 (de)
GB (1) GB1363775A (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836256A (en) * 1972-05-08 1974-09-17 Perkin Elmer Corp Interferometer for testing telescope optics
US3950103A (en) * 1972-10-27 1976-04-13 Canadian Patents And Development Limited Method and apparatus to determine spatial distribution of magnitude and phase of electro-magnetic fields especially optical fields
US3938892A (en) * 1973-04-24 1976-02-17 The United States Of America As Represented By The United States National Aeronautics And Space Administration Electronic optical transfer function analyzer
US4169980A (en) * 1977-04-19 1979-10-02 Zygo Corporation Method and apparatus for interference fringe center sensing
US4225240A (en) * 1978-06-05 1980-09-30 Balasubramanian N Method and system for determining interferometric optical path length difference
FR2433205B1 (de) * 1978-08-08 1982-12-17 Anvar
US4340304A (en) * 1978-08-11 1982-07-20 Rockwell International Corporation Interferometric method and system
US4213697A (en) * 1978-11-06 1980-07-22 The United States Of America As Represented By The Secretary Of The Army Phase measuring device
DE2916202A1 (de) * 1979-04-21 1980-10-23 Ibm Deutschland Verfahren zur analyse des polarisationszustandes einer strahlung und vorrichtung zur durchfuehrung des verfahrens
US4387994A (en) * 1980-02-04 1983-06-14 Balasubramanian N Optical system for surface topography measurement
US4340306A (en) * 1980-02-04 1982-07-20 Balasubramanian N Optical system for surface topography measurement
FR2483609A1 (fr) * 1980-05-30 1981-12-04 Balasubramanian N Dispositif et procede de determination interferometrique d'une difference de longueur de chemin optique
NL8005258A (nl) * 1980-09-22 1982-04-16 Philips Nv Interferometer.
EP0062083B1 (de) * 1981-04-04 1985-11-27 Ibm Deutschland Gmbh Einrichtung zur Bestimmung des Polarisationszustandes eines Lichtwellenfeldes und Verwendungen der Einrichtung zu interferometrischen und holographischen Messungen
US4594003A (en) * 1983-07-20 1986-06-10 Zygo Corporation Interferometric wavefront measurement
US4606638A (en) * 1983-11-03 1986-08-19 Zygo Corporation Distance measuring interferometer and method of use
US4639139A (en) * 1985-09-27 1987-01-27 Wyko Corporation Optical profiler using improved phase shifting interferometry
US4832489A (en) * 1986-03-19 1989-05-23 Wyko Corporation Two-wavelength phase-shifting interferometer and method
US4735507A (en) * 1986-07-11 1988-04-05 The Perkin-Elmer Corporation Imaging coherent radiometer
GB8820761D0 (en) * 1988-09-02 1988-10-05 Tyrer J R Interferometry
US5042949A (en) * 1989-03-17 1991-08-27 Greenberg Jeffrey S Optical profiler for films and substrates
US5286313A (en) * 1991-10-31 1994-02-15 Surface Combustion, Inc. Process control system using polarizing interferometer
US5638396A (en) * 1994-09-19 1997-06-10 Textron Systems Corporation Laser ultrasonics-based material analysis system and method
US5724138A (en) * 1996-04-18 1998-03-03 Textron Systems Corporation Wavelet analysis for laser ultrasonic measurement of material properties
US5721616A (en) * 1996-04-24 1998-02-24 Zygo Corporation Tilt free micromotion translator
US6438272B1 (en) 1997-12-31 2002-08-20 The Research Foundation Of State University Of Ny Method and apparatus for three dimensional surface contouring using a digital video projection system
US6788210B1 (en) 1999-09-16 2004-09-07 The Research Foundation Of State University Of New York Method and apparatus for three dimensional surface contouring and ranging using a digital video projection system
US6819435B2 (en) * 2000-04-12 2004-11-16 Nano Or Technologies Inc. Spatial and spectral wavefront analysis and measurement
JP2002071515A (ja) * 2000-08-31 2002-03-08 Canon Inc 測定装置及び測定方法
AU2002230068A1 (en) * 2001-02-06 2002-08-19 Nano-Or Technologies (Israel) Ltd. Multiple layer optical storage device
DE10130902A1 (de) * 2001-06-27 2003-01-16 Zeiss Carl Interferometersystem, Verfahren zum Aufnehmen eines Interferogramms und Verfahren zum Bereitstellen und Herstellen eines Objekts mit einer Soll-Oberfläche
EP1476715B1 (de) * 2002-01-24 2018-10-10 Icos Vision Systems N.V. Verbesserte räumliche wellenfrontanalyse und 3d-messung
HU0203993A2 (hu) * 2002-11-19 2004-08-30 László Domján Binokuláris videoszemüveg optikai rendszere
US7187431B2 (en) * 2004-11-16 2007-03-06 Asml Netherlands B.V. Lithographic apparatus, method of determining properties thereof and computer program
GB2431986A (en) * 2005-11-03 2007-05-09 Isis Innovation Detecting the local slope and orientation of a wavefront from the changes in an interference pattern caused by the rotation of a shearing element
CN100460857C (zh) * 2006-04-13 2009-02-11 中山大学 一种基于动态稳定扫描技术的傅里叶光谱仪
WO2014050141A1 (ja) * 2012-09-27 2014-04-03 国立大学法人北海道大学 光位相測定方法、光位相測定装置および光通信装置
FR3022346A1 (fr) * 2014-06-16 2015-12-18 Commissariat Energie Atomique DEVICE AND METHOD FOR CHARACTERIZING A LIGHT BEAM
GB2542622A (en) * 2015-09-28 2017-03-29 Cambridge Entpr Ltd Method and apparatus for performing complex fourier transforms

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3127465A (en) * 1961-01-16 1964-03-31 Gen Precision Inc Three-phase interferometer
US3527537A (en) * 1968-02-09 1970-09-08 Itek Corp Automatic correlating interferometer

Also Published As

Publication number Publication date
BE778402A (fr) 1972-05-16
CH562445A5 (de) 1975-05-30
US3694088A (en) 1972-09-26
DE2201830C3 (de) 1978-05-24
JPS5119996B1 (de) 1976-06-22
GB1363775A (en) 1974-08-14
DE2201830B2 (de) 1977-09-29
DD96779A5 (de) 1973-04-05
BE778402A1 (de)
FR2124822A5 (de) 1972-09-22

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)