JPS5116928B2 - - Google Patents
Info
- Publication number
- JPS5116928B2 JPS5116928B2 JP5834272A JP5834272A JPS5116928B2 JP S5116928 B2 JPS5116928 B2 JP S5116928B2 JP 5834272 A JP5834272 A JP 5834272A JP 5834272 A JP5834272 A JP 5834272A JP S5116928 B2 JPS5116928 B2 JP S5116928B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Agricultural Chemicals And Associated Chemicals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5834272A JPS5116928B2 (fr) | 1972-06-12 | 1972-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5834272A JPS5116928B2 (fr) | 1972-06-12 | 1972-06-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4919028A JPS4919028A (fr) | 1974-02-20 |
| JPS5116928B2 true JPS5116928B2 (fr) | 1976-05-28 |
Family
ID=13081632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5834272A Expired JPS5116928B2 (fr) | 1972-06-12 | 1972-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5116928B2 (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5544771A (en) * | 1978-09-26 | 1980-03-29 | Fujitsu Ltd | Manufacture of semiconductor |
| JPS60210832A (ja) * | 1984-04-04 | 1985-10-23 | Agency Of Ind Science & Technol | 化合物半導体結晶基板の製造方法 |
| JPS60210831A (ja) * | 1984-04-04 | 1985-10-23 | Agency Of Ind Science & Technol | 化合物半導体結晶基板の製造方法 |
| JPS63133615A (ja) * | 1986-11-26 | 1988-06-06 | Fujitsu Ltd | 気相成長方法 |
| FR2912552B1 (fr) * | 2007-02-14 | 2009-05-22 | Soitec Silicon On Insulator | Structure multicouche et son procede de fabrication. |
-
1972
- 1972-06-12 JP JP5834272A patent/JPS5116928B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4919028A (fr) | 1974-02-20 |