JPS5116928B2 - - Google Patents

Info

Publication number
JPS5116928B2
JPS5116928B2 JP5834272A JP5834272A JPS5116928B2 JP S5116928 B2 JPS5116928 B2 JP S5116928B2 JP 5834272 A JP5834272 A JP 5834272A JP 5834272 A JP5834272 A JP 5834272A JP S5116928 B2 JPS5116928 B2 JP S5116928B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5834272A
Other languages
Japanese (ja)
Other versions
JPS4919028A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5834272A priority Critical patent/JPS5116928B2/ja
Publication of JPS4919028A publication Critical patent/JPS4919028A/ja
Publication of JPS5116928B2 publication Critical patent/JPS5116928B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
JP5834272A 1972-06-12 1972-06-12 Expired JPS5116928B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5834272A JPS5116928B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-12 1972-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5834272A JPS5116928B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-12 1972-06-12

Publications (2)

Publication Number Publication Date
JPS4919028A JPS4919028A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-20
JPS5116928B2 true JPS5116928B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-05-28

Family

ID=13081632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5834272A Expired JPS5116928B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-12 1972-06-12

Country Status (1)

Country Link
JP (1) JPS5116928B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544771A (en) * 1978-09-26 1980-03-29 Fujitsu Ltd Manufacture of semiconductor
JPS60210832A (ja) * 1984-04-04 1985-10-23 Agency Of Ind Science & Technol 化合物半導体結晶基板の製造方法
JPS60210831A (ja) * 1984-04-04 1985-10-23 Agency Of Ind Science & Technol 化合物半導体結晶基板の製造方法
JPS63133615A (ja) * 1986-11-26 1988-06-06 Fujitsu Ltd 気相成長方法
FR2912552B1 (fr) * 2007-02-14 2009-05-22 Soitec Silicon On Insulator Structure multicouche et son procede de fabrication.

Also Published As

Publication number Publication date
JPS4919028A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-20

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