JPS51148367A - Layer construction radiant ray resist - Google Patents

Layer construction radiant ray resist

Info

Publication number
JPS51148367A
JPS51148367A JP50072580A JP7258075A JPS51148367A JP S51148367 A JPS51148367 A JP S51148367A JP 50072580 A JP50072580 A JP 50072580A JP 7258075 A JP7258075 A JP 7258075A JP S51148367 A JPS51148367 A JP S51148367A
Authority
JP
Japan
Prior art keywords
layer construction
radiant ray
ray resist
resist
radiant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50072580A
Other languages
English (en)
Japanese (ja)
Other versions
JPS576253B2 (Direct
Inventor
Yasuhiro Yoneda
Toshisuke Kitakoji
Masatoshi Fujimori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50072580A priority Critical patent/JPS51148367A/ja
Publication of JPS51148367A publication Critical patent/JPS51148367A/ja
Publication of JPS576253B2 publication Critical patent/JPS576253B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP50072580A 1975-06-14 1975-06-14 Layer construction radiant ray resist Granted JPS51148367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50072580A JPS51148367A (en) 1975-06-14 1975-06-14 Layer construction radiant ray resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50072580A JPS51148367A (en) 1975-06-14 1975-06-14 Layer construction radiant ray resist

Publications (2)

Publication Number Publication Date
JPS51148367A true JPS51148367A (en) 1976-12-20
JPS576253B2 JPS576253B2 (Direct) 1982-02-04

Family

ID=13493449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50072580A Granted JPS51148367A (en) 1975-06-14 1975-06-14 Layer construction radiant ray resist

Country Status (1)

Country Link
JP (1) JPS51148367A (Direct)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461931A (en) * 1977-10-26 1979-05-18 Seiko Epson Corp Forming method of photo resist patterns
JPS5465480A (en) * 1977-11-04 1979-05-26 Tokyo Ouka Kougiyou Kk Method of forming microminiature pattern
JPS5487525A (en) * 1977-12-30 1979-07-12 Ibm Resist construction
JPS59222928A (ja) * 1983-06-02 1984-12-14 Matsushita Electronics Corp マスク製作方法
JPH0287146A (ja) * 1988-09-26 1990-03-28 Hitachi Ltd 半導体装置の製造方法
JP2008068876A (ja) * 2006-09-12 2008-03-27 Fuji Seal International Inc ブリスター包装体

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461931A (en) * 1977-10-26 1979-05-18 Seiko Epson Corp Forming method of photo resist patterns
JPS5465480A (en) * 1977-11-04 1979-05-26 Tokyo Ouka Kougiyou Kk Method of forming microminiature pattern
JPS5487525A (en) * 1977-12-30 1979-07-12 Ibm Resist construction
JPS59222928A (ja) * 1983-06-02 1984-12-14 Matsushita Electronics Corp マスク製作方法
JPH0287146A (ja) * 1988-09-26 1990-03-28 Hitachi Ltd 半導体装置の製造方法
JP2008068876A (ja) * 2006-09-12 2008-03-27 Fuji Seal International Inc ブリスター包装体

Also Published As

Publication number Publication date
JPS576253B2 (Direct) 1982-02-04

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