JPS51141738A - Method of depositing luthenium - Google Patents

Method of depositing luthenium

Info

Publication number
JPS51141738A
JPS51141738A JP51057340A JP5734076A JPS51141738A JP S51141738 A JPS51141738 A JP S51141738A JP 51057340 A JP51057340 A JP 51057340A JP 5734076 A JP5734076 A JP 5734076A JP S51141738 A JPS51141738 A JP S51141738A
Authority
JP
Japan
Prior art keywords
luthenium
depositing
depositing luthenium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51057340A
Other languages
English (en)
Japanese (ja)
Inventor
Nooman Kurosubii Jiefurii
Shidonii Hanrii Robaato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inco Ltd
Original Assignee
Inco Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inco Ltd filed Critical Inco Ltd
Publication of JPS51141738A publication Critical patent/JPS51141738A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Contacts (AREA)
JP51057340A 1975-05-20 1976-05-20 Method of depositing luthenium Pending JPS51141738A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB21497/75A GB1499549A (en) 1975-05-20 1975-05-20 Deposition of ruthenium

Publications (1)

Publication Number Publication Date
JPS51141738A true JPS51141738A (en) 1976-12-06

Family

ID=10163942

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51057340A Pending JPS51141738A (en) 1975-05-20 1976-05-20 Method of depositing luthenium

Country Status (14)

Country Link
JP (1) JPS51141738A (enExample)
AT (1) ATA366276A (enExample)
AU (1) AU1369576A (enExample)
BE (1) BE842027A (enExample)
CA (1) CA1087040A (enExample)
CH (1) CH603809A5 (enExample)
DE (1) DE2622181A1 (enExample)
DK (1) DK220776A (enExample)
ES (1) ES448043A1 (enExample)
FR (1) FR2311859A1 (enExample)
GB (1) GB1499549A (enExample)
NL (1) NL7605002A (enExample)
SE (1) SE7605668L (enExample)
ZA (1) ZA762641B (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301865A (ja) * 1988-05-30 1989-12-06 Nippon Telegr & Teleph Corp <Ntt> 薄膜成長方法および薄膜成長装置
JPH0472066A (ja) * 1990-07-11 1992-03-06 Dowa Mining Co Ltd 有機金属錯体を用いる薄膜の製造法
JPH0474866A (ja) * 1990-07-13 1992-03-10 Dowa Mining Co Ltd １，３―ジケトン系有機金属錯体を用いる薄膜の製造方法
JP2012041564A (ja) * 2010-08-12 2012-03-01 Tokyo Electron Ltd 成膜装置及び成膜方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT410757B (de) * 1993-12-10 2003-07-25 Tyrolia Freizeitgeraete Skibremse
US9725794B2 (en) 2014-12-17 2017-08-08 Kennametal Inc. Cemented carbide articles and applications thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301865A (ja) * 1988-05-30 1989-12-06 Nippon Telegr & Teleph Corp <Ntt> 薄膜成長方法および薄膜成長装置
JPH0472066A (ja) * 1990-07-11 1992-03-06 Dowa Mining Co Ltd 有機金属錯体を用いる薄膜の製造法
JPH0474866A (ja) * 1990-07-13 1992-03-10 Dowa Mining Co Ltd １，３―ジケトン系有機金属錯体を用いる薄膜の製造方法
JP2012041564A (ja) * 2010-08-12 2012-03-01 Tokyo Electron Ltd 成膜装置及び成膜方法

Also Published As

Publication number Publication date
BE842027A (fr) 1976-11-22
GB1499549A (en) 1978-02-01
DE2622181A1 (de) 1976-12-09
CA1087040A (en) 1980-10-07
ZA762641B (en) 1977-04-27
SE7605668L (sv) 1976-11-21
CH603809A5 (enExample) 1978-08-31
ES448043A1 (es) 1977-07-01
FR2311859A1 (fr) 1976-12-17
ATA366276A (de) 1977-12-15
NL7605002A (nl) 1976-11-23
DK220776A (da) 1976-11-21
AU1369576A (en) 1977-11-10

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